Composite polymer-core silica-shell abrasive particles during oxide CMP: A defectivity study

Journal of the Electrochemical Society

Volumn 154, Issue 8, 2007, Pages

  Armini, S ^a,b   Whelan, C M ^a   Maex, K ^b   Hernandez, J L ^a   Moinpour, M ^c  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COLLOIDS; COULOMB INTERACTIONS; FINISHING; SILICA; SURFACE ANALYSIS; WEAR OF MATERIALS;

COMPOSITE POLYMERS; QUANTIFICATION; SCRATCHES; SURFACE FINISHING;

ABRASIVES;

EID: 34347366327     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2740038     Document Type: Article

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