Composite polymer core-silica shell abrasives: The effect of the shape of the silica particles on oxide CMP

Journal of the Electrochemical Society

Volumn 155, Issue 6, 2008, Pages

  Armini, S ^a,b   Whelan, C M ^a   Moinpour, M ^c   Maex, K ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; CHEMICAL MECHANICAL POLISHING; HARDNESS; PH EFFECTS; PHASE STABILITY;

COMPOSITE POLYMER; CORE-SILICA SHELL ABRASIVES; PARTICLE STABILITY;

SILICA;

EID: 43049103836     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2901864     Document Type: Article

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