Preparation of α-alumina-g-polyacrylamide composite abrasive and chemical mechanical polishing behavior

Thin Solid Films

Volumn 516, Issue 10, 2008, Pages 3005-3008

  Lei, Hong ^a   Lu, Haishen ^a   Luo, Jianbin ^b   Lu, Xinchun ^b  

^a SHANGHAI UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Alumina; Chemical mechanical polishing; Composite abrasive; Glass substrate; Graft polymerization

Indexed keywords

ALUMINA; ATOMIC FORCE MICROSCOPY; CHEMICAL MECHANICAL POLISHING; COMPOSITE MATERIALS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MORPHOLOGY; POLYACRYLATES; POLYMERIZATION; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

GLASS SUBSTRATES; GRAFT POLYMERIZATION; TIME-OF-FLIGHT SECONDARY ION MASS SPECTROSCOPY;

ABRASIVES;

EID: 39649090031     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.11.050     Document Type: Article

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