SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 258, Issue 15, 2012, Pages 5605-5609

Characterization of SiC in DLC/a-Si films prepared by pulsed filtered cathodic arc using Raman spectroscopy and XPS

(5) Srisang, C a,b,c Asanithi, P a Siangchaew, K b Pokaipisit, A a,c Limsuwan, P a,c

a KING MONGKUT'S UNIVERSITY OF TECHNOLOGY THONBURI (Thailand)

b WESTERN DIGITAL CORPORATION (United States)

c Thailand Ministry of Science and Technology (Thailand)

Author keywords

Amorphous silicon; Diamond like carbon; Pulsed filtered cathodic arc; Silicon carbide

Indexed keywords

AMORPHOUS CARBON; BINDING ENERGY; SILICON CARBIDE; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

CATHODIC ARC; DC MAGNETRON SPUTTERING; DEPTH-PROFILE ANALYSIS; DIAMOND LIKE CARBON; GERMANIUM SUBSTRATES; IN-SITU ELLIPSOMETRY; PRECISE CONTROL; SIC FORMATION;

AMORPHOUS SILICON;

EID: 84859159435 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2012.02.036 Document Type: Article

Times cited : (25)

References (39)

1
- 18344398903
- M.V. Gradowski, A.C. Ferrari, R. Ohr, B. Jacoby, H. Hilgers, H.H. Schneider, and H. Adrian Surf. Coat. Technol. 174-175 2003 246
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 246
- Gradowski, M.V.¹ Ferrari, A.C.² Ohr, R.³ Jacoby, B.⁴ Hilgers, H.⁵ Schneider, H.H.⁶ Adrian, H.⁷

2
- 0037165927
- J. Robertson Mater. Sci. Eng. R 37 2002 129
- (2002) Mater. Sci. Eng. R , vol.37 , pp. 129
- Robertson, J.¹

3
- 0035247759
- J. Robertson Thin Solid Films 383 2001 81
- (2001) Thin Solid Films , vol.383 , pp. 81
- Robertson, J.¹

4
- 18744396348
- M.G. Beghi, A.C. Ferrari, K.B.K. Teo, J. Robertson, C.E. Bottani, A. Libassi, and B.K. Tanner Appl. Phys. Lett. 81 2002 3804
- (2002) Appl. Phys. Lett. , vol.81 , pp. 3804
- Beghi, M.G.¹ Ferrari, A.C.² Teo, K.B.K.³ Robertson, J.⁴ Bottani, C.E.⁵ Libassi, A.⁶ Tanner, B.K.⁷

5
- 0034187306
- H. Kohira, V. Prabhakaran, and F.E. Talke Tribol. Int. 33 2000 315
- (2000) Tribol. Int. , vol.33 , pp. 315
- Kohira, H.¹ Prabhakaran, V.² Talke, F.E.³

6
- 33846272809
- W.C. Poh, S.N. Piramanayagam, J.R. Shi, and T. Liew Diamond Relat. Mater. 16 2007 379
- (2007) Diamond Relat. Mater. , vol.16 , pp. 379
- Poh, W.C.¹ Piramanayagam, S.N.² Shi, J.R.³ Liew, T.⁴

7
- 0034140267
- B. Tomcik, T. Osipowicz, and J.Y Lee Thin Solid Films 360 2000 173
- (2000) Thin Solid Films , vol.360 , pp. 173
- Tomcik, B.¹ Osipowicz, T.² Lee, J.Y.³

8
- 33846513394
- M. Kano New Diamond Front. Carbon Technol. 16 2006 201
- (2006) New Diamond Front. Carbon Technol. , vol.16 , pp. 201
- Kano, M.¹

9
- 33747230370
- S.A. Smallwood, K.C. Eapen, S.T. Patton, and J.S. Zabinski Wear 260 2006 1179
- (2006) Wear , vol.260 , pp. 1179
- Smallwood, S.A.¹ Eapen, K.C.² Patton, S.T.³ Zabinski, J.S.⁴

10
- 0034313975
- D.S. Patil, K. Ramachandran, N. Venkatramani, M. Pandey, and R.D. Cunha Pramana J. Phys. 55 2000 933
- (2000) Pramana J. Phys. , vol.55 , pp. 933
- Patil, D.S.¹ Ramachandran, K.² Venkatramani, N.³ Pandey, M.⁴ Cunha, R.D.⁵

11
- 0019060771
- C. Weissmantel, K. Bewilogua, D. Dietrich, H.J. Erler, H.J. Hinneberg, S. Klose, W. Nowick, and G. Reisse Thin Solid Films 72 1980 19
- (1980) Thin Solid Films , vol.72 , pp. 19
- Weissmantel, C.¹ Bewilogua, K.² Dietrich, D.³ Erler, H.J.⁴ Hinneberg, H.J.⁵ Klose, S.⁶ Nowick, W.⁷ Reisse, G.⁸

12
- 36549102584
- N. Savvides J. Appl. Phys. 59 1986 4133
- (1986) J. Appl. Phys. , vol.59 , pp. 4133
- Savvides, N.¹

13
- 0006413423
- S. Xu, B.K. Tay, H.S. Tan, Li Zhong, Y.Q. Tu, S.R.P. Silva, and W.I. Milne J. Appl. Phys. 79 1996 7234
- (1996) J. Appl. Phys. , vol.79 , pp. 7234
- Xu, S.¹ Tay, B.K.² Tan, H.S.³ Zhong, L.⁴ Tu, Y.Q.⁵ Silva, S.R.P.⁶ Milne, W.I.⁷

14
- 0032001210
- J.Y. Shim, E.J. Chi, H.K. Baik, and S.M. Lee Jpn. J. Appl. Phys. 37 1998 440
- (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 440
- Shim, J.Y.¹ Chi, E.J.² Baik, H.K.³ Lee, S.M.⁴

15
- 0030289539
- H.S. Scheibe, D. Drescher, B. Schultrich, M. Falz, G. Leonhardt, and R. Wilberg Surf. Coat. Technol. 85 1996 209
- (1996) Surf. Coat. Technol. , vol.85 , pp. 209
- Scheibe, H.S.¹ Drescher, D.² Schultrich, B.³ Falz, M.⁴ Leonhardt, G.⁵ Wilberg, R.⁶

16
- 34548011734
- F.X. Liu, K.L. Yao, and Z.L. Liu Diamond Relat. Mater. 16 2007 1746
- (2007) Diamond Relat. Mater. , vol.16 , pp. 1746
- Liu, F.X.¹ Yao, K.L.² Liu, Z.L.³

17
- 60949112942
- F.X. Liu, and Z.L. Wang Surf. Coat. Technol. 203 2009 1829
- (2009) Surf. Coat. Technol. , vol.203 , pp. 1829
- Liu, F.X.¹ Wang, Z.L.²

18
- 0036840896
- W. Zhanga, A. Tanakab, K. Wazumia, and Y. Kogab Diamond Relat. Mater. 11 2002 1837
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1837
- Zhanga, W.¹ Tanakab, A.² Wazumia, K.³ Kogab, Y.⁴

19
- 0035360926
- D. Sheeja, B.K. Tay, S.P. Lau, and Xu Shi Wear 249 2001 433
- (2001) Wear , vol.249 , pp. 433
- Sheeja, D.¹ Tay, B.K.² Lau, S.P.³ Shi, X.⁴

20
- 0032676965
- M. Maharizi, O. Segal, E. Jacob, Y. Rosenwaks, T. Meoded, N. Croitoru, and A. Seidman Diamond Relat. Mater. 8 1999 1050
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1050
- Maharizi, M.¹ Segal, O.² Jacob, E.³ Rosenwaks, Y.⁴ Meoded, T.⁵ Croitoru, N.⁶ Seidman, A.⁷

21
- 49549112484
- M. Zhong, C. Zhang, and J. Luo Appl. Surf. Sci. 254 2008 6742
- (2008) Appl. Surf. Sci. , vol.254 , pp. 6742
- Zhong, M.¹ Zhang, C.² Luo, J.³

22
- 0034072224
- J. Jiang, and R.D. Arnell Wear 239 2000 1
- (2000) Wear , vol.239 , pp. 1
- Jiang, J.¹ Arnell, R.D.²

23
- 79251593238
- H.A. Castillo, E.R. Parra, and P.J. Arango Appl. Surf. Sci. 257 2011 2665
- (2011) Appl. Surf. Sci. , vol.257 , pp. 2665
- Castillo, H.A.¹ Parra, E.R.² Arango, P.J.³

24
- 0030416935
- D. Drees, J.P. Celis, E. Dekempeneer, and J. Meneve Surf. Coat. Technol. 86-87 1996 575
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 575
- Drees, D.¹ Celis, J.P.² Dekempeneer, E.³ Meneve, J.⁴

25
- 64549143740
- J.W. Yi, J. Kim, M. Moon, K. Lee, and S. Kim Tribol. Lett. 34 2009 223
- (2009) Tribol. Lett. , vol.34 , pp. 223
- Yi, J.W.¹ Kim, J.² Moon, M.³ Lee, K.⁴ Kim, S.⁵

26
- 0031103845
- A.A. Voevodin, S.D. Walck, and J.S. Zabinski Wear 203-204 1997 516
- (1997) Wear , vol.203-204 , pp. 516
- Voevodin, A.A.¹ Walck, S.D.² Zabinski, J.S.³

27
- 4243611622
- M.P. Delplancke-Ogletree, and O.R. Monteiro Surf. Coat. Technol. 108-109 1998 484
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 484
- Delplancke-Ogletree, M.P.¹ Monteiro, O.R.²

28
- 80053373989
- S. Mahdavi, and F. Akhlaghi J. Mater. Sci. 46 2011 7883
- (2011) J. Mater. Sci. , vol.46 , pp. 7883
- Mahdavi, S.¹ Akhlaghi, F.²

29
- 0041821732
- Y. Zhan, and G. Zhang J. Mater. Sci. Lett. 22 2003 1087
- (2003) J. Mater. Sci. Lett. , vol.22 , pp. 1087
- Zhan, Y.¹ Zhang, G.²

30
- 84859163118
- M. Gui, and S.B. Kang Metall. Mater. Trans. A 32A 2004 2383
- (2004) Metall. Mater. Trans. A , vol.32 A , pp. 2383
- Gui, M.¹ Kang, S.B.²

31
- 0035859435
- T. Brar, P. France, and P.G. Smirniotis J. Phys. Chem. B 105 2001 5383
- (2001) J. Phys. Chem. B , vol.105 , pp. 5383
- Brar, T.¹ France, P.² Smirniotis, P.G.³

32
- 0347477259
- I.S. Moon, and G. Cho Mater. Sci. Eng. C 24 2004 301
- (2004) Mater. Sci. Eng. C , vol.24 , pp. 301
- Moon, I.S.¹ Cho, G.²

33
- 0037532569
- J.K.N. Linder Appl. Phys. A 77 2003 27
- (2003) Appl. Phys. A , vol.77 , pp. 27
- Linder, J.K.N.¹

34
- 1942532913
- C.J. Lee, G. Pezzotti, Y. Okui, and S. Nishino Appl. Surf. Sci. 228 2004 10
- (2004) Appl. Surf. Sci. , vol.228 , pp. 10
- Lee, C.J.¹ Pezzotti, G.² Okui, Y.³ Nishino, S.⁴

35
- 18444404377
- M. Veres, M. Koós, S. Tóth, M. Füle, I. Pócsik, A. Tóth, M. Mohai, and I. Bertóti Diamond Relat. Mater. 14 2005 1051
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1051
- Veres, M.¹ Koós, M.² Tóth, S.³ Füle, M.⁴ Pócsik, I.⁵ Tóth, A.⁶ Mohai, M.⁷ Bertóti, I.⁸

36
- 0242603790
- A.C. Ferrari, and J. Robertson Phys. Rev. B 61 2000 14095
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

37
- 0034667001
- A.C. Ferrari, A. Libassi, B.K. Tanner, V. Stolojan, J. Yuan, L.M. Brown, S.E. Rodil, B. Kleinsorge, and J. Robertson Phys. Rev. B 62 2000 11089
- (2000) Phys. Rev. B , vol.62 , pp. 11089
- Ferrari, A.C.¹ Libassi, A.² Tanner, B.K.³ Stolojan, V.⁴ Yuan, J.⁵ Brown, L.M.⁶ Rodil, S.E.⁷ Kleinsorge, B.⁸ Robertson, J.⁹

38
- 0033099132
- W. Cho, Y. Oh, C. Kim, M. Osada, M. Kakihana, D. Lim, and D. Cheong J. Alloys Compd. 285 1999 255
- (1999) J. Alloys Compd. , vol.285 , pp. 255
- Cho, W.¹ Oh, Y.² Kim, C.³ Osada, M.⁴ Kakihana, M.⁵ Lim, D.⁶ Cheong, D.⁷

39
- 84859163115
- M. Dickinson, Application Note Nanoindentation of DLC Coatings, www.hyitron.com.
- Application Note Nanoindentation of DLC Coatings
- Dickinson, M.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.