Physical properties of a:DLC films and their dependence on parameters of deposition and type of substrate

Diamond and Related Materials

Volumn 8, Issue 6, 1999, Pages 1050-1056

  Maharizi, M ^a   Segal, O ^a   Ben Jacob, E ^a   Rosenwaks, Y ^a   Meoded, T ^a   Croitoru, N ^a   Seidman, A ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

A:DLC films; Average height profile; Nanohardness; Nanostructure

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; CHEMICAL BONDS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GERMANIUM; GRAIN SIZE AND SHAPE; GRANULATION; HARDNESS; NANOSTRUCTURED MATERIALS; SUBSTRATES; SURFACE ROUGHNESS;

DIAMOND LIKE CARBON (DLC); NANOHARDNESS;

AMORPHOUS FILMS;

EID: 0032676965     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00003-5     Document Type: Article

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