Nanocrystalline SnO 2 and Au:SnO 2 thin films prepared by direct current magnetron reactive sputtering

Vacuum

Volumn 86, Issue 9, 2012, Pages 1323-1327

  Reddy, A Sivasankar ^a   Figueiredo, N M ^a   Cavaleiro, A ^a  

^a UNIVERSITY OF COIMBRA   (Portugal)

Author keywords

Metal oxides; Nanocrystalline films; Sputtering

Indexed keywords

ANNEALING TEMPERATURES; AS-DEPOSITED FILMS; AVERAGE GRAIN SIZE; BLUE-SHIFTED; CRYSTALLINITIES; DC MAGNETRON REACTIVE SPUTTERING; DIRECT-CURRENT MAGNETRONS; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL RESISTIVITY; EMISSION PEAKS; GLASS SUBSTRATES; METAL OXIDES; NANOCRYSTALLINE FILMS; NANOCRYSTALLINES;

ANNEALING; ELECTRIC CONDUCTIVITY; FILM PREPARATION; GOLD COATINGS; MAGNETRONS; OPACITY; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS;

GOLD;

EID: 84859000770     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.12.006     Document Type: Conference Paper

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