NbN/TaNx/NbN SNS Josephson junctions by pulsed laser deposition

IEEE Transactions on Applied Superconductivity

Volumn 11, Issue 1 I, 2001, Pages 88-91

  Kaul, Anupama B ^a   Van Duzer, Theodore ^b  

^a University of California Berkeley   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Internally shunted Josephson junctions; NbN; Nonlatching logic; TaNx

Indexed keywords

ATOMIC FORCE MICROSCOPY; CURRENT VOLTAGE CHARACTERISTICS; MAGNETOMETERS; MULTILAYERS; NIOBIUM COMPOUNDS; NITROGEN; PRESSURE; PULSED LASER DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SQUIDS; TANTALUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

NIOBIUM NITRIDE; TANTALUM NITRIDE; TRILAYER GROWTH; TRILAYER TECHNOLOGY;

JOSEPHSON JUNCTION DEVICES;

EID: 0035268733     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.919291     Document Type: Conference Paper

References (14)

1. All refractory NbN integrated circuit process
2. RSFQ logic/memory family: A new Josephson junction technology for sub-teraherz clock frequency digital systems
3. Superconducting weak links
4. Metastable nitride synthesis by pulsed laser deposition: A new phase in the NbNx system
5. Crystallographic and morphological characterization of reactively sputtered Ta, Ta-N and Ta-N-O thin films
6. Very small critical current spreads in Nb/Al-AlOx/Nb integrated circuits using low-temperature and low-stress ECR PECVD silicon oxide films
7. c Nb/Al-AlOx/Nb integrated circuit process
8. Fluxon interaction in an overdamped Josephson transmission line
9. n internally shunted sputtered NbN Josephson junctions with a TaNx barrier for nonlatching logic applications
10. Growth of thin films by laser-induced evaporation
11. c superconducting NbN films with low particulate density grown at 25 °C using pulsed laser deposition