Tip geometry effects in dopant profiling by scanning microwave microscopy

Journal of Applied Physics

Volumn 111, Issue 4, 2012, Pages

  Humer, I ^a   Eckhardt, C ^b   Huber, H P ^c   Kienberger, F ^d   Smoliner, J ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b UNIVERSITY OF VIENNA   (Austria)

^c INSTITUTE FOR MICROELECTRONICS   (Austria)

^d Agilent Technologies Osterrreich GmbH   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION CURVES; DOPANT PROFILING; EXPERIMENTAL DATA; MICROWAVE MICROSCOPY; POISSON SOLVERS; SPATIAL RESOLUTION; STRONG CORRELATION; TIP GEOMETRY; TIP RADIUS;

CALIBRATION;

SCANNING;

EID: 84857888179     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3686748     Document Type: Article

References (11)

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