Formation of self-organized nanostructures on semi-insulating InP by 100 keV Ar + -ion irradiation

Applied Surface Science

Volumn 258, Issue 9, 2012, Pages 4139-4143

  Mohanty, Jyoti Ranjan ^a   Basu, Tanmoy ^b   Kanjilal, D ^c   Som, T ^b  

^a Nalanda Institute of Technology   (India)

^b INSTITUTE OF PHYSICS   (India)

^c INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

InP; Mounds; Preferential sputtering; Self organized nanostructures

Indexed keywords

III-V SEMICONDUCTORS; INDIUM PHOSPHIDE; INSULATION; ION BOMBARDMENT; IONS; NANOSTRUCTURES; SEMICONDUCTING INDIUM PHOSPHIDE; SUBSTRATES; SURFACE ROUGHNESS;

ANGLE OF INCIDENCE; INTERMEDIATE ENERGIES; LOW ENERGY EXPERIMENT; MOUNDS; PREFERENTIAL SPUTTERING; SELF-ORGANIZED NANOSTRUCTURES; SUBSTRATE ROTATION; SURFACE SMOOTHENING;

VANADIUM COMPOUNDS;

EID: 84857051524     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.06.095     Document Type: Conference Paper

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