Angular distribution of In and P particles sputtered from InP by inert-gas ion bombardment

Surface Science

Volumn 376, Issue 1-3, 1997, Pages 163-168

  Tanemura, M ^a   Aoyama, T ^a   Otani, A ^a   Ukita, M ^a   Okuyama, F ^a   Chini, T K ^b  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b SAHA INSTITUTE OF NUCLEAR PHYSICS   (India)

Author keywords

Angular distribution; Indium; Indium phosphide; Phosphorus; Sputtering

Indexed keywords

INDIUM; ION BOMBARDMENT; PARTICLES (PARTICULATE MATTER); PHOSPHORUS; SPUTTERING; SURFACE PHENOMENA;

ANGULAR DISTRIBUTION;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0031118866     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(97)01301-0     Document Type: Article

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