Studies of InP nano dots formation after keV Ar+ irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1257-1260

  Paramanik, Dipak ^a   Varma, Shikha ^a  

^a INSTITUTE OF PHYSICS   (India)

Author keywords

61.82.Fk; 68.37.Ps; 81.16.Dn; 81.16.Rf; Atomic force microscopy; III V semiconductors; Ion beam; Nanoscale pattern formation; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; COARSENING; SEMICONDUCTING INDIUM PHOSPHIDE; SPUTTERING;

NANO DOTS; NANOSCALE PATTERN FORMATION; SURFACE SMOOTHENING;

NANOSTRUCTURED MATERIALS;

EID: 43049183591     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.12.109     Document Type: Article

References (16)

1. Sigmund P. Phys. Rev. 184 (1969) 383
2. Mark Bradley R., and Harper J.M.E. J. Vac. Sci. Technol. A 6 (1988) 2390
3. Demanet C.M., Vijaya Sankar K., and Malherbe J.B. Surf. Interf. Anal. 24 (1996) 503
4. Frost F., Ziberi B., Hoche T., and Rauschenbach B. Nucl. Instr. and Meth. B 216 (2004) 9
5. Facsko S., Dekorsy T., Koerdt C., Trappe C., Kurz H., Vogt A., and Hartnagel H.L. Science 285 (1999) 1551
6. Kahng B., Jeong H., and Barabasi A.-L. Appl. Phys. Lett. 78 (2001) 805
7. Tan S.K., and Wee A.T.S. J. Vac. Sci. Technol. B 24 (2006) 1444
8. Frost F., Schindler A., and Bigl F. Phys. Rev. Lett. 85 (2000) 4116
9. Paramanik D., and Varma S. Nucl. Instr. and Meth. B 244 (2006) 81
10. Cuerno R., and Barabasi A.-L. Phys. Rev. Lett. 74 (1995) 4746
11. Castro M., Cuerno R., Vazquez L., and Gago R. Phys. Rev. Lett. 94 (2005) 016102
12. D. Paramanik, S.Majumdar, S.R. Sahoo, S.N. Sahu, S.Varma, J. Appl. Phys., submitted for publication.
13. D. Paramanik, S.Majumdar, S.R. Sahoo, S.Varma, J. Nanosci. Nanotech. 8 (2008), in press.
14. Paramanik D., Pradhan A., and Varma S. J. Appl. Phys. 99 (2006) 014304
15. Dey S., Paramanik D., Ganeshan V., and Varma S. Appl. Surf. Sci. 253 (2006) 1116
16. Mayr S.G., Moske M., and Samwer K. Phys. Rev. B 60 (1999) 16950