Self-organized nanodot formation on InP(100) by argon ion sputtering at normal incidence

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 3, 2006, Pages 1444-1448

  Tan, S K ^a   Wee, A T S ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; NANOSTRUCTURED MATERIALS; PHOSPHORUS; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

BACKSCATTERED ELECTRON COMPOSITION IMAGING (COMPO); COARSENING; NANODOT ARRAYS; PREFERENTIAL SPUTTERING;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 33744831489     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2203643     Document Type: Article

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