Nanostructure fabrication of InP by low energy ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 648-652

  Yuba, Yoshihiko ^a   Hazama, Sumiaki ^a   Gamo, Kenji ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Dot; InP; Ion; Nanostructure; Sputtering; Topography

Indexed keywords

CRYSTAL GROWTH; DOSIMETRY; ION BEAMS; ION BOMBARDMENT; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR QUANTUM DOTS; SPUTTERING;

LOW ENERGY ION BEAMS;

NANOSTRUCTURED MATERIALS;

EID: 0038075163     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00812-7     Document Type: Conference Paper

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