Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 248, Issue 1, 2006, Pages 83-89

  Tan, S K ^a   Liu, R ^a   Sow, C H ^a   Wee, A T S ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

InP; Ion beam sputtering; Nanodots

Indexed keywords

CURRENT DENSITY; INDIUM COMPOUNDS; ION BEAMS; IONIC CONDUCTION; PHOSPHORUS; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

INP; ION BEAM SPUTTERING; NANODOTS;

NANOSTRUCTURED MATERIALS;

EID: 33744942329     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.170     Document Type: Article

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