Contact transport of focused ion beam-deposited Pt to Si nanowires: From measurement to understanding

Applied Physics Letters

Volumn 100, Issue 5, 2012, Pages

  Ke, J J ^a   Tsai, K T ^a   Dai, Y A ^a   He, J H ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE ESTIMATION; BARRIER HEIGHTS; CONTACT BEHAVIOR; DEVICE DESIGN; DIFFUSION THEORY; ELECTRON CONCENTRATION; IDEALITY FACTORS; SI NANOWIRE; SPECIFIC CONTACT RESISTIVITY;

ELECTRON MOBILITY; NANOWIRES; OHMIC CONTACTS; PLATINUM; SILICON;

FOCUSED ION BEAMS;

EID: 84857000699     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3680251     Document Type: Article

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32. See supplementary material at http://dx.doi.org/10.1063/1.3680251 E-APPLAB-100-067205 for experimental setup.