Modeling of nitrogen atom recombination on Pyrex: Influence of the vibrationally excited N2 molecules on the loss probability of N

Journal of Applied Physics

Volumn 87, Issue 10, 2000, Pages 7497-7507

  Lefevre L ^a   Belmonte, T ^a   Michel, H ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000314223     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373015     Document Type: Article

References (52)

1. H. Michel, T. Czerwiec, M. Gantois, D. Ablitzer, and A. Ricard, Surf. Coat. Technol. 72, 103 (1995).
2. H. Malvos, A. Ricard, J. Szekely, H. Michel, M. Gantois, and D. Ablitzer, Surf. Coat. Technol. 59, 59 (1993).
3. A. Ricard, J. Phys. D: Appl. Phys. 30, 2261 (1997).
4. H. Nomura, S. Meikle, Y. Nakanishi, and Y. Hatanaka, J. Appl. Phys. 69, 990 (1991).
5. J. Durand, N. Azema, B. Cros, and L. Cot, J. Phys. III 3, 713 (1993).
6. G. N. Hays, C. J. Tracy, and H. J. Oskam, J. Chem. Phys. 60, 2027 (1974).
7. Dj. A. Bosan, M. K. Radovic, and T. V. Jovanovic, J. Phys. D: Appl. Phys. 27, 286 (1994).
8. V. Lj. Markovic, Z. Lj. Petrovic, and M. M. Pejovic, J. Chem. Phys. 100, 8514 (1994).
9. J. Nahorny, C. M. Ferreira, B. Gordiets, D. Pagnon, M. Touzeau, and M. Vialle, J. Phys. D: Appl. Phys. 28, 738 (1995).
10. B. Gordiets, C. M. Ferreira, J. Nahorny, D. Pagnon, M. Touzeau, and M. Vialle, J. Phys. D: Appl. Phys. 29, 1021 (1996).
11. B. Gordiets, C. M. Ferreira, M. J. Pinheiro, and A. Ricard, Plasma Sources Sci. Technol. 7, 363 (1998).
12. B. Gordiets, C. M. Ferreira, M. J. Pinheiro, and A. Ricard, Plasma Sources Sci. Technol. 7, 379 (1998).
13. G. Lucovski, D. V. Tsu, R. A. Rudder, and R. J. Markunas, in Thin Film Processes II, edited by J. L. Vossen and W. Kern (Academic, New York, 1991), pp. 565-619.
14. A. Ricard, A. Popescu, A. Baltog, and C. P. Lungu, Vide Sci., Tech. Appl. 280 52, 248 (1996).
15. T. Belmonte, L. Lefevre, T. Czerwiec, H. Michel, and A. Ricard, Thin Solid Films 341, 27 (1999).
16. L. Lefèvre, T. Belmonte, T. Czerwiec, A. Ricard, and H. Michel, Surf. Coat. Technol. 116-119, 1244 (1999).
17. L. Lefèvre, T. Belmonte, T. Czerwiec, A. Ricard, and H. Michel, Mater. Sci. Forum 287-288, 397 (1998).
18. T. Belmonte, S. Bockel, C. Bordot, D. Ablitzer, and H. Michel, Appl. Surf. Sci. 135, 259 (1998).
19. T. Yamashita, J. Chem. Phys. 70, 4248 (1979).
20. J. Berkowitz, W. A. Chupka, and G. B. Kistiakowsky, J. Chem. Phys. 25, 457 (1956).
21. K. M. Evenson and D. S. Burch, J. Chem. Phys. 45, 956 (1966).
22. V. Lj. Markovic, Z. Lj. Petrovic, and M. M. Pejovic, Jpn. J. Appl. Phys., Part 1 34, 2466 (1995).
23. Y. C. Kim and M. Boudart, Langmuir 7, 2999 (1991).
24. V. I. Egorov, Yu. M. Gershenzon, V. B. Rozenshtein, and S. Ya. Umanskii, Chem. Phys. Lett. 20, 77 (1973).
25. G. Black, H. Wise, S. Schechter, and R. L. Sharpless, J. Chem. Phys. 60, 3526 (1974).
26. T. F. Hunter, J. Chem. Phys. 51, 2641 (1969).
27. P. Supiot, O. Dessaux, and P. Goudmand, J. Phys. D: Appl. Phys. 28, 1826 (1995).
28. C. Chave, C. Boisse-Laporte, J. Marec, and P. Leprince, Mater. Sci. Eng., A 140, 494 (1991).
29. T. Czerwiec, J. Gavillet, T. Belmonte, H. Michel, and A. Ricard, J. Phys. III 6, 1205 (1996).
30. R. Chandra, J. Phys. Chem. 75, 5153 (1981).
31. C. R. Henry, Surf. Sci. 223, 519 (1989).
32. P. Kisliuk, J. Phys. Chem. Solids 5, 78 (1958).
33. M. Boudart and G. Djega-Mariadassou, Cinétique des Réactions en Catalyse Hétérogène (Editions Masson, Paris, 1982).
34. H. Partridge, S. R. Langhoff, C. W. Bauschlicher, and D. W. Schwenke, J. Chem. Phys. 88, 3174 (1988).
35. G. Callede, J. Deschamps, J. L. Godart, and A. Ricard, J. Phys. D: Appl. Phys. 24, 909 (1991).
36. J. Loureiro, Chem. Phys. 157, 157 (1991).
37. J. Loureiro and C. M. Ferreira, J. Phys. D: Appl. Phys. 19, 17 (1986).
38. J. Loureiro and A. Ricard, J. Phys. D: Appl. Phys. 26, 163 (1993).
39. M. Capitelli, C. Gorse, and A. Ricard, J. Phys. (France) Lett. 42, 469 (1981).
40. P. A. Sa and J. Loureiro, J. Phys. D: Appl. Phys. 30, 2320 (1997).
41. A. Gicquel, S. Cavadias, and J. Amouroux, J. Phys. D: Appl. Phys. 19, 2013 (1986).
42. M. J. Murphy, J. F. Skelly, and A. Hodgson, J. Chem. Phys. 109, 3619 (1998).
43. E. L. Milne, J. Chem. Phys. 52, 5360 (1970).
44. A. Ricard, T. Belmonte, S. Bockel, and H. Michel, Czech. J. Phys. 48, 1253 (1998).
45. C. E. Treanor, J. W. Rich, and R. G. Rehm, J. Chem. Phys. 48, 1798 (1968).
46. M. L. Rahman and J. W. Linnett, Trans. Faraday Soc. 67, 170 (1971).
47. R. A. Young, J. Chem. Phys. 34, 1292 (1961).
48. K. M. Sancier, W. J. Fredericks, J. L. Hatchett, and H. Wise, J. Chem. Phys. 37, 1798 (1962).
49. T. Wentink, J. O. Sullivan, and K. L. Wray, J. Chem. Phys. 29, 231 (1958).
50. C. B. Kretschmer and H. L. Petersen, J. Chem. Phys. 39, 1772 (1963).
51. C. Mavroyannis and C. A. Winkler, Can. J. Chem. 39, 1601 (1961).
52. L. Lefèvre, T. Belmonte, T. Czerwiec, A. Ricard, and H. Michel, Appl. Surf. Sci. 153, 85 (2000).