Effective surface oxidation of polymer replica molds for nanoimprint lithography

Nanoscale Research Letters

Volumn 7, Issue , 2012, Pages

  Ryu, Ilhwan ^a   Hong, Dajung ^a   Yim, Sanggyu ^a  

^a Kookmin University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; ETCHING; MOLDS; NANOSTRUCTURES; OXIDATION; PHOTOOXIDATION; POLYMERS;

ANTI-ADHESIVE SURFACES; NANOSTRUCTURED SURFACE; NON DESTRUCTIVE; OXIDATION TREATMENTS; OXIDATIVE TREATMENT; SURFACE NANOSTRUCTURE; SURFACE OXIDATIONS; WATER CONTACT ANGLE;

NANOIMPRINT LITHOGRAPHY;

EID: 84856025134     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1186/1556-276X-7-39     Document Type: Article

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