Optical characterization and reverse engineering based on multiangle spectroscopy

Applied Optics

Volumn 51, Issue 2, 2012, Pages 245-254

  Tikhonravov, Alexander V ^a   Amotchkina, Tatiana V ^a   Trubetskov, Michael K ^a   Francis, Robert J ^b   Janicki, Vesna ^c   Sancho Parramon, Jordi ^c   Zorc, Hrvoje ^c   Pervak, Vladimir ^d  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b AGILENT TECHNOLOGIES   (Australia)

^c RUDER BO KOVI INSTITUTE   (Croatia)

^d UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; FILM PREPARATION; MULTILAYER FILMS; MULTILAYERS; REFLECTION; REVERSE ENGINEERING; SPECTROPHOTOMETRY; THIN FILMS;

ELECTRON BEAM EVAPORATION; INCIDENCE ANGLES; MULTI-ANGLE; MULTI-LAYER-COATING; MULTIANGLE REFLECTANCES; OPTICAL CHARACTERIZATION; PHOTOMETRIC DATA; POLARIZATION STATE;

CHARACTERIZATION;

EID: 84855828862     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.51.000245     Document Type: Article

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