On-line characterization and reoptimization of optical coatings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5250, Issue , 2004, Pages 406-413

  Tikhonravov, Alexander ^a   Trubetskov, Michael ^a  

^a Research Computing Center   (Russian Federation)

Author keywords

On line characterization; Optical coatings; Reoptimization; Thin films

Indexed keywords

ALGORITHMS; COMPUTER SOFTWARE; DEPOSITION; MAGNETRON SPUTTERING; MONITORING; ONLINE SYSTEMS; OPTIMIZATION; REFRACTIVE INDEX; THIN FILMS; VACUUM APPLICATIONS;

ONLINE CHARACTERIZATION; REOPTIMIZATION;

OPTICAL COATINGS;

EID: 1942457353     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.513379     Document Type: Conference Paper

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