메뉴 건너뛰기




Volumn 47, Issue 28, 2008, Pages 5208-5220

Estimation of the thickness and the optical parameters of several stacked thin films using optimization

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSION (WAVES); DISPERSIONS; OPTICAL CONSTANTS; QUANTUM THEORY; REFRACTIVE INDEX; REVERSE ENGINEERING; WEBSITES;

EID: 60749119229     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.005208     Document Type: Article
Times cited : (15)

References (28)
  • 1
    • 13744252093 scopus 로고    scopus 로고
    • Optical properties of dielectric and semiconductor thin films
    • S. Nalwa ed, Academic, Chap. 12, pp
    • I. Chambouleyron and J. M. Martínez, "Optical properties of dielectric and semiconductor thin films," Handbook of Thin Films Materials, H, S. Nalwa ed., (Academic, 2001), Vol. 3, Chap. 12, pp. 593-622
    • (2001) Handbook of Thin Films Materials, H , vol.3 , pp. 593-622
    • Chambouleyron, I.1    Martínez, J.M.2
  • 2
    • 0042563151 scopus 로고    scopus 로고
    • Methods for the determination of the optical constants of thin films from single transmission measurements: A critical review
    • D. Poelman and P. F. Smet, "Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review," J. Phys. D 36, 1850-1857 (2003).
    • (2003) J. Phys. D , vol.36 , pp. 1850-1857
    • Poelman, D.1    Smet, P.F.2
  • 3
    • 0001384606 scopus 로고    scopus 로고
    • Estimation of the optical constants and the thickness of thin films using unconstrained optimization
    • E. G. Birgin, I. Chambouleyron, and J. M. Martinez, "Estimation of the optical constants and the thickness of thin films using unconstrained optimization," J. Comput. Phys. 151, 862-880 (1999).
    • (1999) J. Comput. Phys , vol.151 , pp. 862-880
    • Birgin, E.G.1    Chambouleyron, I.2    Martinez, J.M.3
  • 4
    • 0000044081 scopus 로고    scopus 로고
    • Determination of thickness and optical constants of amorphous silicon films from transmittance data
    • M. Mulato, I. Chambouleyron, E. G. Birgin, and J. M. Martinez, "Determination of thickness and optical constants of amorphous silicon films from transmittance data," Appl. Phys. Lett. 77, 2133-2135 (2000).
    • (2000) Appl. Phys. Lett , vol.77 , pp. 2133-2135
    • Mulato, M.1    Chambouleyron, I.2    Birgin, E.G.3    Martinez, J.M.4
  • 5
    • 18644378980 scopus 로고    scopus 로고
    • Optimal constants and thickness determination of very thin amorphous semiconductor films
    • I. Chambouleyron, S. D. Ventura, E. G. Birgin, and J. M. Martinez, "Optimal constants and thickness determination of very thin amorphous semiconductor films," J. Appl. Phys. 92, 3093-3102 (2002).
    • (2002) J. Appl. Phys , vol.92 , pp. 3093-3102
    • Chambouleyron, I.1    Ventura, S.D.2    Birgin, E.G.3    Martinez, J.M.4
  • 6
    • 13744259356 scopus 로고    scopus 로고
    • Optimization techniques for the estimation of the thickness and the optical parameters of thin films using reflectance data
    • S. D. Ventura, E. G. Birgin, J. M. Martinez, and I. Chambouleyron, "Optimization techniques for the estimation of the thickness and the optical parameters of thin films using reflectance data," J. Appl. Phys. 97, 043512 (2005).
    • (2005) J. Appl. Phys , vol.97 , pp. 043512
    • Ventura, S.D.1    Birgin, E.G.2    Martinez, J.M.3    Chambouleyron, I.4
  • 7
    • 84893891184 scopus 로고    scopus 로고
    • TFCalc, Software Spectra Inc., Portland, Oreg., USA, www .sspectra.com, 2008.
    • TFCalc, Software Spectra Inc., Portland, Oreg., USA, www .sspectra.com, 2008.
  • 8
    • 84893892509 scopus 로고    scopus 로고
    • Scientific Computing Int, Encinitas, Calif, USA
    • Filmwizard, Scientific Computing Int., Encinitas, Calif, USA, www.sci-soft.com, 2008.
    • (2008) Filmwizard
  • 10
    • 0037334685 scopus 로고    scopus 로고
    • Optimization problems in the estimation or parameters of thin films and the elimination of the influence of the substrate
    • E. G. Birgin, I. Chambouleyron, and J. M. Martinez, "Optimization problems in the estimation or parameters of thin films and the elimination of the influence of the substrate," J. Comput. Appl. Math. 152, 35-50 (2003).
    • (2003) J. Comput. Appl. Math , vol.152 , pp. 35-50
    • Birgin, E.G.1    Chambouleyron, I.2    Martinez, J.M.3
  • 13
    • 0020940620 scopus 로고
    • Determination of the thickness and optical constants of amorphous silicon
    • R. Swanepoel, "Determination of the thickness and optical constants of amorphous silicon," J. Phys. E 16, 1214-1222 (1983).
    • (1983) J. Phys. E , vol.16 , pp. 1214-1222
    • Swanepoel, R.1
  • 14
    • 84975657032 scopus 로고
    • Inversion of normal-incidence (R,T) measurements to obtain n + ik for thin films
    • T. C. Paulick, "Inversion of normal-incidence (R,T) measurements to obtain n + ik for thin films," Appl. Opt. 25, 562-564 (1986).
    • (1986) Appl. Opt , vol.25 , pp. 562-564
    • Paulick, T.C.1
  • 16
    • 60749127974 scopus 로고    scopus 로고
    • Optimization techniques for film parameter estimation,
    • Ph.D. thesis Department of Applied Mathematics, University of Campinas
    • S. D. Ventura, "Optimization techniques for film parameter estimation," Ph.D. thesis (Department of Applied Mathematics, University of Campinas, 2004).
    • (2004)
    • Ventura, S.D.1
  • 17
    • 0031542191 scopus 로고    scopus 로고
    • The Barzilai and Borwein gradient method for the large unconstrained minimization problem
    • M. Raydan, "The Barzilai and Borwein gradient method for the large unconstrained minimization problem," SIAM J. Optim. 7, 26-33 (1997).
    • (1997) SIAM J. Optim , vol.7 , pp. 26-33
    • Raydan, M.1
  • 18
    • 0141467950 scopus 로고    scopus 로고
    • A spectral conjugate gradient method for unconstrained optimization
    • E. G. Birgin and J. M. Martinez, "A spectral conjugate gradient method for unconstrained optimization," Appl. Math. Optim. 43, 117-128 (2001).
    • (2001) Appl. Math. Optim , vol.43 , pp. 117-128
    • Birgin, E.G.1    Martinez, J.M.2
  • 19
    • 0038373019 scopus 로고    scopus 로고
    • Thickness and optical constant distributions of PECVD a-SiCx : H thin films along electrode radial direction
    • B. Akaoglu, I. Atilgan, and B. Katircioglu, "Thickness and optical constant distributions of PECVD a-SiCx : H thin films along electrode radial direction," Thin Solid Films 437, 257-265 (2003).
    • (2003) Thin Solid Films , vol.437 , pp. 257-265
    • Akaoglu, B.1    Atilgan, I.2    Katircioglu, B.3
  • 21
    • 0036795325 scopus 로고    scopus 로고
    • Visible spectral dependence of the scattering and absorption coefficients of pigmented coatings from inversion of diffuse reflectance spectra
    • F. Curiel, W. E. Vargas, and R. G. Barrera, "Visible spectral dependence of the scattering and absorption coefficients of pigmented coatings from inversion of diffuse reflectance spectra," Appl. Opt. 41, 5969-5978 (2002).
    • (2002) Appl. Opt , vol.41 , pp. 5969-5978
    • Curiel, F.1    Vargas, W.E.2    Barrera, R.G.3
  • 22
    • 1542306764 scopus 로고    scopus 로고
    • Transmission of visible light through oxidized copper films: Feasibility of using a spectral projected gradient method
    • A. Ramirez-Porras and W. E. Vargas-Castro, "Transmission of visible light through oxidized copper films: feasibility of using a spectral projected gradient method," Appl. Opt. 43, 1508-1514 (2004).
    • (2004) Appl. Opt , vol.43 , pp. 1508-1514
    • Ramirez-Porras, A.1    Vargas-Castro, W.E.2
  • 25
    • 0038969015 scopus 로고    scopus 로고
    • Exponential absorption edge and disorder in Column IV amorphous semiconductors
    • A. R. Zanatta, M. Mulato, and I. Chambouleyron, "Exponential absorption edge and disorder in Column IV amorphous semiconductors," J. Appl. Phys. 84, 5184-5190 (1998)
    • (1998) J. Appl. Phys , vol.84 , pp. 5184-5190
    • Zanatta, A.R.1    Mulato, M.2    Chambouleyron, I.3
  • 27
    • 84935812525 scopus 로고
    • Amorphous germanium I. A model for the structural and optical properties
    • W. Paul, G. A. N. Connell, and R. J. Temkin, "Amorphous germanium I. A model for the structural and optical properties," Adv. Phys. 22, 531-580 (1973).
    • (1973) Adv. Phys , vol.22 , pp. 531-580
    • Paul, W.1    Connell, G.A.N.2    Temkin, R.J.3
  • 28
    • 4243848604 scopus 로고
    • High-resolution electron microscope observations of voids in amorphous Ge
    • T. M. Donovan and K. Heinemann, "High-resolution electron microscope observations of voids in amorphous Ge," Phys. Rev. Lett. 27, 1794-1796 (1971).
    • (1971) Phys. Rev. Lett , vol.27 , pp. 1794-1796
    • Donovan, T.M.1    Heinemann, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.