On the accuracy of optical thin film parameter determination based on spectrophotometric data

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5188, Issue , 2003, Pages 190-199

  Tikhonravov, Alexander ^a   Trubetskov, Michael ^a   DeBell, Gary ^b  

^a Research Computing Center   (Russian Federation)

^b MLD Technologies   (United States)

Author keywords

Optical characterization; Photometry; Refractive index; Thin films

Indexed keywords

DIELECTRIC THIN FILMS; OPTICAL PARAMETERS; OPTICAL THIN FILM; SPECTROPHOTOMETRIC DATA;

COMPUTATION THEORY; DATA REDUCTION; MEASUREMENT ERRORS; NUMERICAL ANALYSIS; OPTICAL COATINGS; RANDOM ERRORS; REFRACTIVE INDEX; SPECTROPHOTOMETRY; THICK FILMS;

THIN FILMS;

EID: 2342560546     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505499     Document Type: Conference Paper

References (12)

1. J. P. Borgogno and P. Bousquet and F. Flory and B. Lazarides and E. Pelletier and P. Roche, "Inhomogeneity in films: limitation of the accuracy of optical monitoring of thin films", Appl. Opt. 20, 90-94 (1981)
2. J. P. Borgogno and B. Lazarides and E. Pelletier, "Automatic determination of optical constants of inhomogeneous thin films", Appl. Opt. 21, 4020-4029 (1982).
3. J. P. Borgogno and F. Flory and P. Roche and B. Schmitt and G. Albrand and E. Pelletier and H. A. Macleod, "Refractive index and inhomogeneity of thin films", Appl. Opt., 23, 3567-3570 (1984).
4. A. V. Tikhonravov, M. K. Trubetskov, I.V. Kochikov, J. B. Oliver, D. J. Smith, "Real-time characterization and optimization of e-beam evaporated optical coatings", in Optical Interference Coatings, OSA Technical Digest (Optical Society of America, Washington DC, 2001), ME8-1-ME8-3.
5. A. V. Tikhonravov, et. al., "On-line characterization and reoptimization of electron-beam evaporated optical coatings", OSA Annual Meeting/ILS-XYI Conference, Providence, Rhode Island, 2000.
6. Brian T. Sullivan, Glenn A. Clarke, Takayuki Akiyama, Norman Osborne, Martial Ranger, J. A. Dobrowolski, Louisa Howe, Akira Matsumoto, Yizhou Song, Kazuo Kikuchi "High-rate automated deposition system for the manufacture of complex multilayer coatings", Appl. Opt., 39, 157-167 (2000).
7. A. V. Tikhonravov and M. K. Trubetskov and M. A. Kokarev and T. V. Amotchkina and A. Duparré and E. Quesnel and D. Ristau and S. Günster, "Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films", Appl. Opt., 41, 2555-2560 (2002).
8. A. V. Tikhonravov, M. K. Trubetskov, B.T. Sullivan, J.A. Dobrowolski, "Influence of small inhomogeneities on spectral characteristics of single thin films", Appl. Opt., 36, 7188-7198 (1997).
9. H. Schröder, "Bemerkung zur Theorie des Lichtdurchgangs durch inhomogene durchsichtige Schichten", 5th series, Annalen der Physik, 39, 55-58 (1941).
10. G. Koppelmann and K. Krebs, "Die Optischen Eigenschaften Dielektrischer Schichten mit Kleinen Homogen-itatsstorungen", Zeitschrift für Physik, 164, 539-556 (1961).
11. A. V. Tikhonravov, M. K. Trubetskov, OptiChar software, http://www.optilayer.com, version 4.66 (2003).
12. S. Furman and A. V. Tikhonravov, Basics of Optics of Multilayer Systems, Edition Frontieres, Gif-sur-Yvette (1992).