Optical metrology of thin films using high-accuracy spectro-photometric measurements with oblique angles of incidence

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5250, Issue , 2004, Pages 234-242

  Nevas, Saulius ^a   Manoocheri, Farshid ^a   Ikonen, Erkki ^a   Tikhonravov, Alexander ^b   Kokarev, Michail ^b   Trubetskov, Michail ^b  

^a AALTO UNIVERSITY   (Finland)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Characterization; Measurement; Oblique incidence; Optical parameters; Polarization; Refractive index; Thin film; Transmittance

Indexed keywords

LIGHT POLARIZATION; LIGHT TRANSMISSION; MATHEMATICAL MODELS; OPTICAL COATINGS; PARAMETER ESTIMATION; REFRACTIVE INDEX; RELIABILITY; SPECTROPHOTOMETRY;

FUSED QUARTZ; OPTICAL PARAMETERS;

THIN FILMS;

EID: 1942534615     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.512700     Document Type: Conference Paper

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