Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence

Applied Optics

Volumn 45, Issue 7, 2006, Pages 1392-1397

  Lamminpää, Antti ^a   Nevas, Saulius ^a   Manoocheri, Farshid ^a   Ikonen, Erkki ^a,b  

^a AALTO UNIVERSITY   (Finland)

^b CENTRE FOR METROLOGY AND ACCREDITATION MIKES   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; DATA ACQUISITION; SILICA; SPECTROPHOTOMETRY;

BREWSTER'S ANGLE; OBLIQUE ANGLES OF INCIDENCE; OBLIQUE-INCIDENCE SPECTROPHOTOMETRIC MEASUREMENTS;

THIN FILMS;

EID: 33645241788     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001392     Document Type: Article

References (12)

1. J. A. Dobrowolski, F. C. Ho, and A. Waldorf, "Determination of optical constants of thin film coating materials based on inverse synthesis," Appl. Opt. 22, 3191-3200 (1983).
2. I. Chambouleyron, J. M. Martinez, A. C. Moretti, and M. Mulato, "Retrieval of optical constants and thicknesses of thin films from transmission spectra," Appl. Opt. 36, 8238-8247 (1997).
3. M. Nenkov and T. Pencheva, "Calculation of thin-film optical constants by transmittance-spectra fitting," J. Opt. Soc. Am. A 15, 1852-1857 (1998).
4. A. V. Tikhonravov, M. K. Trubetskov, M. A. Kokarev, T. V. Amotchkina, A. Duparré, E. Quesnel, D. Ristau, and S. Günster, "Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films," Appl. Opt. 41, 2555-2560 (2002).
5. S. Nevas, F. Manoocheri, and E. Ikonen, "Determination of thin film parameters from high accuracy measurements of spectral regular transmittance," Metrologia 40, S200-S203 (2003).
6. S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, "Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence," in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
7. A. Haapalinna, F. Manoochehri, and E. Ikonen, "High-accuracy measurement of specular spectral reflectance and transmittance," Anal. Chim. Acta 380, 317-325 (1999).
8. International Bureau of Weights and Measures, "The BIPM key comparison data base. Appendix C, Calibration and measurement capabilities of National Metrology Institutes," http://kcdb.bipm.org_appendixC.
9. F. Manoochehri and E. Ikonen, "High-accuracy spectrometer for measurement of regular spectral transmittance," Appl. Opt. 34, 3686-3692 (1995).
10. W. S. Rodney and R. J. Spindler, "Index of refraction of fused quartz glass for ultraviolet, visible, and infrared wavelengths," J. Opt. Soc. Am. 44, 677-679 (1954).
11. W. S. Rodney and R. J. Spindler, "The index of refraction of fused quartz glass for ultraviolet, visible, and infrared wave-lengths: errata," J. Opt. Soc. Am. 44, 889 (1954).
12. S. Nevas, F. Manoocheri, and E. Ikonen, "Gonioreflectometer for measuring spectral diffuse reflectance," Appl. Opt. 43, 6391-6399 (2004).