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Volumn 8, Issue 4, 2012, Pages 1184-1189
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Fabrication of low-cost submicron patterned polymeric replica mold with high elastic modulus over a large area
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Author keywords
[No Author keywords available]
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Indexed keywords
CROSS-LINKING DENSITY;
HIGH DURABILITY;
HIGH ELASTIC MODULUS;
HIGH MECHANICAL PROPERTIES;
HIGH THROUGHPUT;
LINE-AND-SPACE PATTERNS;
LOADING-UNLOADING CYCLES;
LOW COSTS;
MULTISCALES;
NANO-DEVICES;
NANOINDENTATION METHOD;
PHYSICAL CONTACTS;
REPRODUCIBILITIES;
SUBMICRON;
SUBMICRON PATTERNING;
ULTRAVIOLET-NANOIMPRINT LITHOGRAPHY;
DENSITY (SPECIFIC GRAVITY);
DURABILITY;
ELASTIC MODULI;
FABRICATION;
MOLDS;
NANOIMPRINT LITHOGRAPHY;
NANOINDENTATION;
UNLOADING;
POLYMERS;
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EID: 84855461440
PISSN: 1744683X
EISSN: 17446848
Source Type: Journal
DOI: 10.1039/c1sm06788e Document Type: Article |
Times cited : (20)
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References (20)
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