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Volumn 191, Issue 1, 2005, Pages 25-32
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Investigation of the mechanical properties of thin films by nanoindentation, considering the effects of thickness and different coating-substrate combinations
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Author keywords
Coating and substrate; Mechanical property; Nanoindentation
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Indexed keywords
COATINGS;
ELASTIC MODULI;
HARDNESS;
NANOTECHNOLOGY;
SILICON;
SUBSTRATES;
JOSLIN AND OLIVER METHOD;
LOAD DISPLACEMENT;
THIN FILMS;
COATING;
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EID: 10244266382
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.03.037 Document Type: Article |
Times cited : (151)
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References (42)
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