SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 110, Issue 10, 2011, Pages

Effect of (O, As) dual implantation on p-type doping of ZnO films

(6) Oh Kim, Chang a Hee Shin, Dong a Kim, Sung a Choi, Suk Ho a Belay, K b Elliman, R G b

a Kyung Hee University (South Korea)

b AUSTRALIAN NATIONAL UNIVERSITY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ACCEPTOR LEVELS; CURRENT-VOLTAGE MEASUREMENTS; ELECTRICAL CHARACTERISTIC; FLUENCES; I - V CURVE; OXYGEN VACANCY CONCENTRATION; P-N JUNCTION; P-TYPE; P-TYPE DOPING; P-TYPE ZNO FILM; RF-SPUTTERING; ROOM TEMPERATURE; SI(1 0 0); ZNO; ZNO FILMS;

METALLIC FILMS; OXYGEN VACANCIES; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS; SILICON WAFERS; ZINC OXIDE;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 82555204708 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3662908 Document Type: Conference Paper

Times cited : (9)

References (29)

1
- 34547198950
- Electrophotoluminescence of ZnO film
- DOI 10.1063/1.2753760
- X. Ma, P. Chen, D. Li, Y. Zhang, and D. Yang, Appl. Phys. Lett. 91, 021105 (2007). 10.1063/1.2753760 (Pubitemid 47114701)
- (2007) Applied Physics Letters , vol.91 , Issue.2 , pp. 021105
- Ma, X.¹ Chen, P.² Li, D.³ Zhang, Y.⁴ Yang, D.⁵

2
- 33750513795
- 10.1002/adma.v18:20
- J.-H. Lim, C.-K. Kang, K.-K. Kim, D.-K. Hwang, and S.-J. Park, Adv. Mater. 18, 2720 (2006). 10.1002/adma.v18:20
- (2006) Adv. Mater. , vol.18 , pp. 2720
- Lim, J.-H.¹ Kang, C.-K.² Kim, K.-K.³ Hwang, D.-K.⁴ Park, S.-J.⁵

3
- 77958052612
- 10.1063/1.3496038
- H. L. Pan, B. Yao, T. Yang, Y. Xu, B. Y. Zhang, W. W. Liu, and D. Z. Shen, Appl. Phys. Lett. 97, 142101 (2010). 10.1063/1.3496038
- (2010) Appl. Phys. Lett. , vol.97 , pp. 142101
- Pan, H.L.¹ Yao, B.² Yang, T.³ Xu, Y.⁴ Zhang, B.Y.⁵ Liu, W.W.⁶ Shen, D.Z.⁷

4
- 78650665264
- 10.1063/1.3518059
- B. Y. Zhang, B. Yao, Y. F. Li, Z. Z. Zhang, B. H. Li, C. X. Shan, D. X. Zhao, and D. Z. Shen, Appl. Phys. Lett. 97, 222101 (2010). 10.1063/1.3518059
- (2010) Appl. Phys. Lett. , vol.97 , pp. 222101
- Zhang, B.Y.¹ Yao, B.² Li, Y.F.³ Zhang, Z.Z.⁴ Li, B.H.⁵ Shan, C.X.⁶ Zhao, D.X.⁷ Shen, D.Z.⁸

5
- 35648965120
- 10.3938/jkps.51.1378
- D. K. Lee, S. Kim, M. C. Kim, S. H. Eom, H. T. Oh, and S.-H. Choi, J. Korean Phys. Soc. 51, 1378 (2007). 10.3938/jkps.51.1378
- (2007) J. Korean Phys. Soc. , vol.51 , pp. 1378
- Lee, D.K.¹ Kim, S.² Kim, M.C.³ Eom, S.H.⁴ Oh, H.T.⁵ Choi, S.-H.⁶

6
- 38849197860
- High-efficient ultraviolet emission in phonon-reduced ZnO films: The role of germanium
- DOI 10.1063/1.2832759
- S. Kim, D. K. Lee, S. H. Hong, S. H. Eom, H. T. Oh, S.-H. Choi, H. N. Hwang, and C. C. Hwang, J. Appl. Phys. 103, 023514 (2008). 10.1063/1.2832759 (Pubitemid 351190689)
- (2008) Journal of Applied Physics , vol.103 , Issue.2 , pp. 023514
- Kim, S.¹ Lee, D.K.² Hong, S.H.³ Eom, S.H.⁴ Oh, H.T.⁵ Choi, S.-H.⁶ Hwang, H.N.⁷ Hwang, C.C.⁸

7
- 33646789818
- Room-temperature magneto-optics of ferromagnetic transition-metal-doped ZnO thin films
- DOI 10.1103/PhysRevLett.96.197208
- J. R. Neal, A. J. Behan, R. M. Ibrahim, H. J. Blythe, M. Ziese, A. M. Fox, and G. A. Gehring, Phys. Rev. Lett. 96, 197208 (2006). 10.1103/PhysRevLett. 96.197208 (Pubitemid 43763658)
- (2006) Physical Review Letters , vol.96 , Issue.19 , pp. 197208
- Neal, J.R.¹ Behan, A.J.² Ibrahim, R.M.³ Blythe, H.J.⁴ Ziese, M.⁵ Fox, A.M.⁶ Gehring, G.A.⁷

8
- 0035855080
- 10.1063/1.1394173
- B. Lin, Z. Fu, and Y. Jia, Appl. Phys. Lett. 79, 943 (2001). 10.1063/1.1394173
- (2001) Appl. Phys. Lett. , vol.79 , pp. 943
- Lin, B.¹ Fu, Z.² Jia, Y.³

9
- 0010059052
- 10.1103/PhysRevB.63.075205
- S. B. Zhang, S. H. Wei, and A. Zunger, Phys. Rev. B 63, 075205 (2001). 10.1103/PhysRevB.63.075205
- (2001) Phys. Rev. B , vol.63 , pp. 075205
- Zhang, S.B.¹ Wei, S.H.² Zunger, A.³

10
- 79958230334
- 10.1063/1.1504875
- D. C. Look, D. C. Reynolds, C. W. Litton, R. L. Jones, D. B. Eason, and G. Cantwell, Appl. Phys. Lett. 81, 1830 (2002). 10.1063/1.1504875
- (2002) Appl. Phys. Lett. , vol.81 , pp. 1830
- Look, D.C.¹ Reynolds, D.C.² Litton, C.W.³ Jones, R.L.⁴ Eason, D.B.⁵ Cantwell, G.⁶

11
- 58149170319
- 10.1063/1.3054639
- Y. Yang, X. W. Sun, B. K. Tay, G. F. You, S. T. Tan, and K. L. Teo, Appl. Phys. Lett. 93, 253107 (2008). 10.1063/1.3054639
- (2008) Appl. Phys. Lett. , vol.93 , pp. 253107
- Yang, Y.¹ Sun, X.W.² Tay, B.K.³ You, G.F.⁴ Tan, S.T.⁵ Teo, K.L.⁶

12
- 33646396516
- 10.1063/1.2198489
- Y. Nakano, T. Morikawa, T. Ohwaki, and Y. Taga, Appl. Phys. Lett. 88, 172103 (2006). 10.1063/1.2198489
- (2006) Appl. Phys. Lett. , vol.88 , pp. 172103
- Nakano, Y.¹ Morikawa, T.² Ohwaki, T.³ Taga, Y.⁴

13
- 25144462707
- A comprehensive review of ZnO materials and devices
- DOI 10.1063/1.1992666, 041301
- . zgr, Ya. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Doan, V. Avrutin, S.-J. Cho, and H. Morko, J. Appl. Phys. 98, 041301 (2005). 10.1063/1.1992666 (Pubitemid 41348664)
- (2005) Journal of Applied Physics , vol.98 , Issue.4 , pp. 1-103
- Ozgur, U.¹ Alivov, Ya.I.² Liu, C.³ Teke, A.⁴ Reshchikov, M.A.⁵ Dogan, S.⁶ Avrutin, V.⁷ Cho, S.-J.⁸ Morko, H.⁹

14
- 0043269843
- 10.1103/PhysRevLett.90.256401
- L. G. Wang and A. Zunger, Phys. Rev. Lett. 90, 256401 (2003). 10.1103/PhysRevLett.90.256401
- (2003) Phys. Rev. Lett. , vol.90 , pp. 256401
- Wang, L.G.¹ Zunger, A.²

15
- 44649090014
- 10.1016/j.nimb.2008.03.148
- K. Wang, Z. B. Ding, T. X. Chen, D. Chen, S. D. Yao, and Z. X. Fu, Nucl. Instrum. Methods Phys. Res. B 266, 2962 (2008). 10.1016/j.nimb.2008.03.148
- (2008) Nucl. Instrum. Methods Phys. Res. B , vol.266 , pp. 2962
- Wang, K.¹ Ding, Z.B.² Chen, T.X.³ Chen, D.⁴ Yao, S.D.⁵ Fu, Z.X.⁶

16
- 3042855138
- 10.1063/1.1763640
- C. C. Lin, S. Y. Chen, S. Y. Cheng, and H. Y. Lee, Appl. Phys. Lett. 84, 5040 (2004). 10.1063/1.1763640
- (2004) Appl. Phys. Lett. , vol.84 , pp. 5040
- Lin, C.C.¹ Chen, S.Y.² Cheng, S.Y.³ Lee, H.Y.⁴

17
- 0000235265
- 10.1016/0029-554X(80)90440-1
- P. Biersack and L. G. Haggmark, Nucl. Instrum. Methods Phys. Res. B 174, 257 (1980). 10.1016/0029-554X(80)90440-1
- (1980) Nucl. Instrum. Methods Phys. Res. B , vol.174 , pp. 257
- Biersack, P.¹ Haggmark, L.G.²

18
- 2342610743
- 10.1002/pssb.v241:2
- B. K. Meyer, H. Alvesl, D. M. Hofmann, W. Kriegseis, D. Forster, F. Bertram, J. Christen, A. Hoffmann, M. Straburg, M. Dworzak, U. Haboeck, and A. V. Rodina, Phys. Status Solidi B 241, 231 (2004). 10.1002/pssb.v241:2
- (2004) Phys. Status Solidi B , vol.241 , pp. 231
- Meyer, B.K.¹ Alvesl, H.² Hofmann, D.M.³ Kriegseis, W.⁴ Forster, D.⁵ Bertram, F.⁶ Christen, J.⁷ Hoffmann, A.⁸ Straburg, M.⁹ Dworzak, M.¹⁰ Haboeck, U.¹¹ Rodina, A.V.¹²

19
- 0042842374
- 10.1063/1.1590423
- Y. R. Ryu, T. S. Lee, and H. W. White, Appl. Phys. Lett. 83, 87 (2003). 10.1063/1.1590423
- (2003) Appl. Phys. Lett. , vol.83 , pp. 87
- Ryu, Y.R.¹ Lee, T.S.² White, H.W.³

20
- 33750700009
- Investigation on the p -type formation mechanism of arsenic doped p -type ZnO thin film
- DOI 10.1063/1.2364865
- H. S. Kang, G. H. Kim, D. L. Kim, H. W. Chang, B. D. Ahn, and S. Y. Lee, Appl. Phys. Lett. 89, 181103 (2006). 10.1063/1.2364865 (Pubitemid 44705647)
- (2006) Applied Physics Letters , vol.89 , Issue.18 , pp. 181103
- Kang, H.S.¹ Kim, G.H.² Kim, D.L.³ Chang, H.W.⁴ Ahn, B.D.⁵ Lee, S.Y.⁶

21
- 3142749135
- 10.1063/1.1756220
- T. S. Jeong, M. S. Han, C. J. Youna, and Y. S. Park, J. Appl. Phys. 96, 175 (2004). 10.1063/1.1756220
- (2004) J. Appl. Phys. , vol.96 , pp. 175
- Jeong, T.S.¹ Han, M.S.² Youna, C.J.³ Park, Y.S.⁴

22
- 0036001983
- 10.1002/1521-3951(200201)229:2<>1.0.CO;2-O
- C. Morhain, M. Teisseire, S. Ve'zian, F. Vigue', F. Raymond, P. Lorenzini, J. Guion, G. Neu, and J.-P. Faurie, Phys. Status Solidi B 229, 881 (2002). 10.1002/1521-3951(200201)229:2<>1.0.CO;2-O
- (2002) Phys. Status Solidi B , vol.229 , pp. 881
- Morhain, C.¹ Teisseire, M.² Ve'Zian, S.³ Vigue, F.⁴ Raymond, F.⁵ Lorenzini, P.⁶ Guion, J.⁷ Neu, G.⁸ Faurie, J.-P.⁹

23
- 77956599268
- 10.1149/1.3479688
- Y.-J. Huang, M.-F. Shih, C.-C. Liu, S.-Y. Chu, and K.-Y. Lod, Electrochem. Solid-State Lett. 13, H373 (2010). 10.1149/1.3479688
- (2010) Electrochem. Solid-State Lett. , vol.13 , pp. 373
- Huang, Y.-J.¹ Shih, M.-F.² Liu, C.-C.³ Chu, S.-Y.⁴ Lod, K.-Y.⁵

24
- 0037459324
- 10.1088/0022-3727/36/6/314
- Z. Z. Zhi, Y. C. Liu, B. S. Li, X. T. Zhang, Y. M. Lu, D. Z. Shen, and X. W. Fan, J. Phys. D 36, 719 (2003). 10.1088/0022-3727/36/6/314
- (2003) J. Phys. D , vol.36 , pp. 719
- Zhi, Z.Z.¹ Liu, Y.C.² Li, B.S.³ Zhang, X.T.⁴ Lu, Y.M.⁵ Shen, D.Z.⁶ Fan, X.W.⁷

25
- 79956010497
- Control of p- and n-type conductivity in sputter deposition of undoped ZnO
- DOI 10.1063/1.1449528
- G. Xiong, J. Wilkinson, B. Mischuck, S. Tuzemen, K. B. Ucer, and R. T. Williams, Appl. Phys. Lett. 80, 1195 (2002). 10.1063/1.1449528 (Pubitemid 34180523)
- (2002) Applied Physics Letters , vol.80 , Issue.7 , pp. 1195
- Xiong, G.¹ Wilkinson, J.² Mischuck, B.³ Tuzemen, S.⁴ Ucer, K.B.⁵ Williams, R.T.⁶

26
- 2942642481
- 10.1063/1.1713040
- Y. Ma, G. T. Du, S. R. Yang, Z. T. Li, B. J. Zhao, X. T. Yang, T. P. Yang, Y. T. Zhang, and D. L. Liu, J. Appl. Phys. 95, 6268 (2004). 10.1063/1.1713040
- (2004) J. Appl. Phys. , vol.95 , pp. 6268
- Ma, Y.¹ Du, G.T.² Yang, S.R.³ Li, Z.T.⁴ Zhao, B.J.⁵ Yang, X.T.⁶ Yang, T.P.⁷ Zhang, Y.T.⁸ Liu, D.L.⁹

27
- 28344448489
- Growth of nominally undoped p-type ZnO on Si by pulsed-laser deposition
- DOI 10.1063/1.2056576, 122103
- M.-S. Oh, S.-H. Kim, and T.-Y. Seong, Appl. Phys. Lett. 87, 122103 (2005). 10.1063/1.2056576 (Pubitemid 41717370)
- (2005) Applied Physics Letters , vol.87 , Issue.12 , pp. 1-3
- Oh, M.-S.¹ Kim, S.-H.² Seong, T.-Y.³

28
- 34249881316
- Temperature dependent photoluminescence in oxygen ion implanted and rapid thermally annealed ZnOZnMgO multiple quantum wells
- DOI 10.1063/1.2745264
- X. Wen, J. A. Davis, L. V. Dao, P. Hannaford, V. A. Coleman, H. H. Tan, C. Jagadish, K. Koike, S. Sasa, M. Inoue, and M. Yano, Appl. Phys. Lett. 90, 221914 (2007). 10.1063/1.2745264 (Pubitemid 46872617)
- (2007) Applied Physics Letters , vol.90 , Issue.22 , pp. 221914
- Wen, X.¹ Davis, J.A.² Van Dao, L.³ Hannaford, P.⁴ Coleman, V.A.⁵ Tan, H.H.⁶ Jagadish, C.⁷ Koike, K.⁸ Sasa, S.⁹ Inoue, M.¹⁰ Yano, M.¹¹

29
- 25144483114
- 10.1103/PhysRevLett.27.97
- A. Powell, W. E. Spicer, and J. C. McMenamin, Phys. Rev. Lett. 27, 97 (1971). 10.1103/PhysRevLett.27.97
- (1971) Phys. Rev. Lett. , vol.27 , pp. 97
- Powell, A.¹ Spicer, W.E.² McMenamin, J.C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.