SCOPUS 정보 검색 플랫폼

Review of Scientific Instruments

Volumn 82, Issue 11, 2011, Pages

Fabrication of sharp tungsten-coated tip for atomic force microscopy by ion-beam sputter deposition

(4) Kinoshita, Yukinori a Naitoh, Yoshitaka a Li, Yan Jun a Sugawara, Yasuhiro a

a OSAKA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AFM OBSERVATION; CANTILEVER TIP; FORCE SENSOR; GRAIN STRUCTURES; MECHANICAL STIFFNESS; NON-CONTACT; RADIUS OF CURVATURE; SPUTTER CLEANING; SPUTTER COATING; TIP APEX; TIP-SAMPLE INTERACTION; TRANSFER SYSTEMS; W COATING;

ATOMIC FORCE MICROSCOPY; COATINGS; CONDUCTIVE FILMS; CRYSTAL ATOMIC STRUCTURE; FILM PREPARATION; GERMANIUM; NANOCANTILEVERS; SILICON;

TUNGSTEN;

EID: 82555182701 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3663069 Document Type: Article

Times cited : (23)

References (23)

1
- 0003040358
- 10.1116/1.585467
- A. J. Melmed, J. Vac. Sci. Technol. B 9, 601 (1991). 10.1116/1.585467
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 601
- Melmed, A.J.¹

2
- 33646677697
- Real topography, atomic relaxations, and short-range chemical interactions in atomic force microscopy: The case of the α-Sn Si (111) - (3×3) R30° surface
- DOI 10.1103/PhysRevB.73.205329
- Y. Sugimoto, P. Pou,. Custance, P. Jelinek, S. Morita, R. Pérez, and M. Abe, Phys. Rev. B 73, 205329 (2006). 10.1103/PhysRevB.73.205329 (Pubitemid 43740464)
- (2006) Physical Review B - Condensed Matter and Materials Physics , vol.73 , Issue.20 , pp. 205329
- Sugimoto, Y.¹ Pou, P.² Custance, O.³ Jelinek, P.⁴ Morita, S.⁵ Perez, R.⁶ Abe, M.⁷

3
- 57949093420
- 10.1103/PhysRevB.78.214416
- C. Lazo, V. Caciuc, H. Hlscher, and S. Heinze, Phys. Rev. B 78, 214416 (2008). 10.1103/PhysRevB.78.214416
- (2008) Phys. Rev. B , vol.78 , pp. 214416
- Lazo, C.¹ Caciuc, V.² Hlscher, H.³ Heinze, S.⁴

4
- 50049095807
- 10.1103/PhysRevLett.96.106104
- Y. J. Li, H. Nomura, N. Ozaki, Y. Naitoh, M. Kageshima, Y. Sugawara, C. Hobbs, and L. Kantorovich, Phys. Rev. Lett. 96, 106104 (2006). 10.1103/PhysRevLett.96.106104
- (2006) Phys. Rev. Lett. , vol.96 , pp. 106104
- Li, Y.J.¹ Nomura, H.² Ozaki, N.³ Naitoh, Y.⁴ Kageshima, M.⁵ Sugawara, Y.⁶ Hobbs, C.⁷ Kantorovich, L.⁸

5
- 67649366119
- 10.1088/0957-4484/20/26/264015
- P. Pou, S. A. Ghasemi, P. Jelinek, T. Lenosky, S. Goedecker, and R. Perez, Nanotechnology 20, 264015 (2009). 10.1088/0957-4484/20/26/264015
- (2009) Nanotechnology , vol.20 , pp. 264015
- Pou, P.¹ Ghasemi, S.A.² Jelinek, P.³ Lenosky, T.⁴ Goedecker, S.⁵ Perez, R.⁶

6
- 78649522892
- 10.1016/j.surfre2010.10.001
- W. Melitz, J. Shen, A. C. Kummel, and S. Lee, Surf. Sci. Rep. 66, 1 (2011). 10.1016/j.surfrep.2010.10.001
- (2011) Surf. Sci. Rep. , vol.66 , pp. 1
- Melitz, W.¹ Shen, J.² Kummel, A.C.³ Lee, S.⁴

7
- 0348116901
- Reproducible Electrochemical Etching of Tungsten Probe Tips
- DOI 10.1021/nl010094q
- O. L. Guise, J. W. Ahner, M.-C. Jung, P. C. Goughnour, and J. T. Yates, Nano. Lett. 2, 191 (2002). 10.1021/nl010094q (Pubitemid 135706290)
- (2002) Nano Letters , vol.2 , Issue.3 , pp. 191-193
- Guise, O.L.¹ Ahner, J.W.² Jung, M.-C.³ Goughnour, P.C.⁴ Yates Jr., J.T.⁵

8
- 17044412892
- Development of a metal-tip cantilever for noncontact atomic force microscopy
- DOI 10.1063/1.1865812, 033705
- K. Akiyama, T. Eguchi, T. An, Y. Fujikawa, Y. Yamada-Takamura, T. Sakurai, and Y. Hasegawa, Rev. Sci. Instrum. 76, 033705 (2005). 10.1063/1.1865812 (Pubitemid 40493877)
- (2005) Review of Scientific Instruments , vol.76 , Issue.3 , pp. 1-3
- Akiyama, K.¹ Eguchi, T.² An, T.³ Fujikawa, Y.⁴ Yamada-Takamura, Y.⁵ Sakurai, T.⁶ Hasegawa, Y.⁷

9
- 36749061986
- High-aspect ratio metal tips attached to atomic force microscopy cantilevers with controlled angle, length, and radius for electrostatic force microscopy
- DOI 10.1063/1.2805513
- L. Cockins, Y. Miyahara, R. Stomp, and P. Grutter, Rev. Sci. Instrum. 78, 113706 (2007). 10.1063/1.2805513 (Pubitemid 350209475)
- (2007) Review of Scientific Instruments , vol.78 , Issue.11 , pp. 113706
- Cockins, L.¹ Miyahara, Y.² Stomp, R.³ Grutter, P.⁴

10
- 18744438078
- 10.1143/JJAP.43.L644
- T. Ikuno, M. Katayama, M. Kishida, K. Kamada, Y. Murata, T. Yasuda, S. Honda, J.-G. Lee, H. Mori, and K. Oura, Jpn. J. Appl. Phys. 43, L644 (2004). 10.1143/JJAP.43.L644
- (2004) Jpn. J. Appl. Phys. , vol.43 , pp. 644
- Ikuno, T.¹ Katayama, M.² Kishida, M.³ Kamada, K.⁴ Murata, Y.⁵ Yasuda, T.⁶ Honda, S.⁷ Lee, J.-G.⁸ Mori, H.⁹ Oura, K.¹⁰

11
- 33244460570
- Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
- DOI 10.1088/0957-4484/17/5/050, PII S0957448406136235
- J. A. J. Steen, J. Hayakawa, T. Harada, K. Lee, F. Calame, G. Boero, A. J. Kulik, and J. Brugger, Nanotechnology 17, 1464 (2006). 10.1088/0957-4484/17/ 5/050 (Pubitemid 43273358)
- (2006) Nanotechnology , vol.17 , Issue.5 , pp. 1464-1469
- Steen, J.A.J.¹ Hayakawa, J.² Harada, T.³ Lee, K.⁴ Calame, F.⁵ Boero, G.⁶ Kulik, A.J.⁷ Brugger, J.⁸

12
- 9744259540
- 10.1063/1.1791321
- A. B. H. Tay and J. T. L. Thong, Rev. Sci. Instrum. 75, 3248 (2004). 10.1063/1.1791321
- (2004) Rev. Sci. Instrum. , vol.75 , pp. 3248
- Tay, A.B.H.¹ Thong, J.T.L.²

13
- 0000734252
- 10.1063/1.1150174
- K. Yokoyama, T. Ochi, T. Uchihashi, M. Ashino, Y. Sugawara, N. Suehira, and S. Morita, Rev. Sci. Instrum. 71, 128 (2000). 10.1063/1.1150174
- (2000) Rev. Sci. Instrum. , vol.71 , pp. 128
- Yokoyama, K.¹ Ochi, T.² Uchihashi, T.³ Ashino, M.⁴ Sugawara, Y.⁵ Suehira, N.⁶ Morita, S.⁷

14
- 0024735921
- Ion beam sputtering deposition of tungsten. Energy and mass effects of primary ions
- DOI 10.1016/0169-4332(89)90549-7
- F. Meyer, D. Bouchier, V. Stambouli, C. Pellet, C. Schwebel, and G. Gautherin, Appl. Surf. Sci. 38, 286 (1989). 10.1016/0169-4332(89)90549-7 (Pubitemid 20603141)
- (1989) Applied Surface Science , vol.38 , Issue.1-4 , pp. 286-294
- Meyer Francoise¹ Bouchier Daniel² Stambouli Valerie³ Pellet Claude⁴ Schwebel Christian⁵ Gautherin Guy⁶

15
- 84916409025
- 10.1116/1.576301
- A. S. Kao, C. Hwang, V. J. Novotny, V. R. Deline, and G. L. Gorman, J. Vac. Sci. Technol. A 7, 2966 (1989). 10.1116/1.576301
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2966
- Kao, A.S.¹ Hwang, C.² Novotny, V.J.³ Deline, V.R.⁴ Gorman, G.L.⁵

16
- 0000835797
- 10.1116/1.577377
- O. Auciello, S. Chevacharoenkul, M. S. Ameen, and J. Duarte, J. Vac. Sci. Technol. A 9, 625 (1991). 10.1116/1.577377
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 625
- Auciello, O.¹ Chevacharoenkul, S.² Ameen, M.S.³ Duarte, J.⁴

17
- 0031524280
- A simplified collisional model of sputtering in the linear cascade regime
- DOI 10.1116/1.580668
- J. E. Mahan and A. Vantomme, J. Vac. Sci. Technol. A 15, 1976 (1997). 10.1116/1.580668 (Pubitemid 127098715)
- (1997) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.15 , Issue.4 , pp. 1976-1989
- Mahan, J.E.¹ Vantomme, A.²

18
- 36549100947
- 10.1063/1.102841
- R. B. Marcus, T. S. Ravi, T. Gmitter, K. Chin, D. Liu, W. J. Orvis, D. R. Ciarlo, C. E. Hunt, and J. Trujillo, Appl. Phys. Lett. 56, 236 (1990). 10.1063/1.102841
- (1990) Appl. Phys. Lett. , vol.56 , pp. 236
- Marcus, R.B.¹ Ravi, T.S.² Gmitter, T.³ Chin, K.⁴ Liu, D.⁵ Orvis, W.J.⁶ Ciarlo, D.R.⁷ Hunt, C.E.⁸ Trujillo, J.⁹

19
- 17044429017
- A Si nanopillar grown on a Si tip by atomic force microscopy in ultrahigh vacuum for a high-quality scanning probe
- DOI 10.1063/1.1866213, 073110
- T. Arai, and M. Tomitori, Appl. Phys. Lett. 86, 073110 (2005). 10.1063/1.1866213 (Pubitemid 40495394)
- (2005) Applied Physics Letters , vol.86 , Issue.7 , pp. 1-3
- Arai, T.¹ Tomitori, M.²

20
- 26044432476
- 10.1063/1.101987
- D. Rugar, H. J. Mamin, and P. Guethner, Appl. Phys. Lett. 55, 2588 (1989). 10.1063/1.101987
- (1989) Appl. Phys. Lett. , vol.55 , pp. 2588
- Rugar, D.¹ Mamin, H.J.² Guethner, P.³

21
- 0032989566
- T. Sato, M. Iwatsuki, and H. Tochihara, J. Electron Microsc. 48, 1 (1999).
- (1999) J. Electron Microsc. , vol.48 , pp. 1
- Sato, T.¹ Iwatsuki, M.² Tochihara, H.³

22
- 0035867892
- 10.1143/JJAP.40.L292
- N. Suehira, Y. Sugawara, and S. Morita, Jpn. J. Appl. Phys. 40, L292 (2001). 10.1143/JJAP.40.L292
- (2001) Jpn. J. Appl. Phys. , vol.40 , pp. 292
- Suehira, N.¹ Sugawara, Y.² Morita, S.³

23
- 67649304943
- 10.1088/0957-4484/20/26/264011
- Y. Naitoh, Y. Kinoshita, Y. J. Li, M. Kageshima, and Y. Sugawara, Nanotechnology 20, 264011 (2009). 10.1088/0957-4484/20/26/264011
- (2009) Nanotechnology , vol.20 , pp. 264011
- Naitoh, Y.¹ Kinoshita, Y.² Li, Y.J.³ Kageshima, M.⁴ Sugawara, Y.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.