Studies of influence of structural properties and thickness of NiO thin films on formaldehyde detection

Thin Solid Films

Volumn 520, Issue 3, 2011, Pages 947-952

  Castro Hurtado, I ^a   Herran J ^a   Mandayo, G G ^a   Castano E ^a  

^a UNIVERSITY OF NAVARRA   (Spain)

Author keywords

Formaldehyde; Gas sensor; NiO; Thickness influence; VOC

Indexed keywords

ALUMINA SUBSTRATES; FEG-SEM; FORMALDEHYDE DETECTION; GAS SENSOR; GRAIN SIZE; LOW CONCENTRATIONS; NIO; NIO THIN FILM; OPERATING TEMPERATURE; REVERSE SIDE; RF REACTIVE MAGNETRON SPUTTERING; SENSOR RESPONSE; SYNTHETIC AIR; THICKNESS INFLUENCE; XRD ANALYSIS;

ALUMINA; ARGON; FORMALDEHYDE; MICROSTRUCTURE; NICKEL OXIDE; PLATINUM; SENSORS; TEMPERATURE; THIN FILMS; VOLATILE ORGANIC COMPOUNDS;

OXIDE FILMS;

EID: 81855185529     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.04.180     Document Type: Conference Paper

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