Microfabricated Formaldehyde gas sensors

Sensors

Volumn 9, Issue 11, 2009, Pages 9196-9215

  Flueckiger, Jonas ^a   Ko, Frank K ^a   Cheung, Karen C ^a  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

Author keywords

Conducting polymer sensor; Formaldehyde sensor; MEMS

Indexed keywords

ADVERSE HEALTH EFFECTS; CONDUCTING POLYMER SENSORS; FORMALDEHYDE SENSOR; LOW TEMPERATURES; LOW-LEVEL EXPOSURE; LOW-POWER OPERATION; MICROFABRICATED SENSORS; WOOD COMPOSITES;

CONDUCTING POLYMERS; ENZYME SENSORS; GAS DETECTORS; MEMS; NANOWIRES; SENSORS; TEXTILES; VOLATILE ORGANIC COMPOUNDS; WOOD PRODUCTS;

FORMALDEHYDE;

EID: 70849114941     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s91109196     Document Type: Review

References (97)

1. Beane Freeman, L.E.; Blair, A.; Lubin, J.H.; Stewart, P.A.; Hayes, R.B.; Hoover, R.N.; Hauptmann, M. Mortality from lymphohematopoietic malignancies among workers in formaldehyde industries: the National Cancer Institute cohort. J. Natl. Cancer Inst. 2009, 101,751-761.
2. Imai, N.; Imai, Y.; Kido, Y. Psychosocial factors that aggravate the symptoms of sick house syndrome in Japan. Nurs. Health Sci. 2008, 10, 101-109.
3. Burge, S.; Hedge, A.; Wilson, S.; Bass, J.H.; Robertson, A. Sick building syndrome: a study of 4373 office workers. Ann. Occup. Hyg. 1987, 31, 493-504.
4. Redlich, C.A.; Sparer, J.; Cullen, M.R. Sick-building syndrome. Lancet 1997, 349, 1013-1016.
5. Kim, W.J.; Terada, N.; Nomura, T.; Takahashi, R.; Lee, S.D.; Park, J.H.; Konno, A., Effect of formaldehyde on the expression of adhesion molecules in nasal microvascular endothelial cells: the role of formaldehyde in the pathogenesis of sick building syndrome. Clin. Exp. Allergy 2002, 32, 287-295.
6. Kawamura, K.; Kerman, K.; Fujihara, M.; Nagatani, N.; Hashiba, T.; Tamiya, E. Development of a novel hand-held formaldehyde gas sensor for the rapid detection of sick building syndrome. Sens. Actuat. B-Chem. 2005, 105, 495-501.
7. Korpan, Y.I.; Gonchar, M.V.; Sibirny, A.A.; Martelet, C.; El'skaya, A.V.; Gibson, T.D.; Soldatkin, A.P. Development of highly selective and stable potentiometric sensors for formaldehyde determination. Biosens. Bioelectron. 2000, 15, 77-83.
8. Wang, J.; Liu, L.; Cong, S.-Y.; Qi, J.-Q.; Xu, B.-K. An enrichment method to detect low concentration formaldehyde. Sens. Actuat. B 2008, 134, 1010-1015.
9. Beasley, R.K.; Hoffmann, C.E.; Rueppel, M.L.; Worley, J.W. Sampling of formaldehyde in air with coated solid sorbent and determination by high performance liquid chromatography. J. Anal. Chem. 2002, 52, 1110-1114.
10. Chan, W.H.; Xie, T.Y. Determination of sub-ppbv levels of formaldehyde in ambient air using Girard's reagent T-coated glass fiber filters and adsorption voltammetry. Anal. Chim. Acta 1997, 349, 349-357.
11. -1 levels formaldehyde via in situ derivatization with Girard's reagent T. Anal. Chim. Acta 1997, 339, 173-179.
12. Dennison, M.J.; Hall, J.M.; Turner, A.P.F. Direct monitoring of formaldehyde vapour and detection of ethanol vapour using dehydrogenase-based biosensors. Analyst 1996, 121, 1769-1773.
13. Achmann, S.; Hämmerle, M.; Moos, R. Amperometric enzyme-based gas sensor for formaldehyde: impact of possible interferences. Sensors 2008, 8, 1351-1365.
14. Mitsubayashi, K.; Nishio, G.; Nakayama, Y.; Amagai, H.; Watanabe, H.; Jaffrezic-Renault, N.; Noguer, T.; Marty, J.-L. Bioelectronic sniffers for formaldehyde in the gas phase. Int. J. Environ. Anal. Chem. 2005, 85, 917-925.
15. Kataky, R.; Bryce, M.R.; Goldenberg, L.; Hayes, S.; Nowak, A. A biosensor for monitoring formaldehyde using a new lipophilic tetrathiafulvalene-tetracyanoquinodimethane salt and a polyurethane membrane. Talanta 2002, 56, 451-458.
16. Achmann, S.; Hämmerle, M.; Moos, R. Amperometric enzyme-based biosensor for direct detection of formaldehyde in the gas phase: dependence on electrolyte composition. Electroanalysis 2007, 20, 410-417.
17. Achmann, S.; Hämmerle, M.; Kita, J.; Moos, R. Miniaturized low temperature co-fired ceramics (LTCC) biosensor for amperometric gas sensing. Sens. Actuat. B 2008, 135, 89-95.
18. Zhou, K.; Ji, X.; Zhang, N.; Zhang, X. On-line monitoring of formaldehyde in air by cataluminescence-based gas sensor. Sens. Actuat. B 2006, 119, 392-397.
19. Song, Z.; Hou, S. On-line monitoring of formaldehyde in water and air using chemiluminescence detection. Int. J. Environ. Anal. Chem. 2003, 83, 807-817.
20. Pereira, E.A.; Dasgupta, P.K. Measurement of atmospheric formaldehyde using a drop collector and in-situ colorimetry. Int. J. Environ. Anal. Chem. 1997, 66, 201-213.
21. Pretto, A.; Milani, M.R.; Cardoso, A.A. Colorimetric determination of formaldehyde in air using a hanging drop of chromotropic acid. J. Environ. Monit. 2000, 2, 566-570.
22. Mine, Y.; Melander, N.; Richter, D.; Lancaster, D.G.; Petrov, K.P.; Curl, R.F.; Tittel, F.K. Detection of formaldehyde using mid-infrared difference-frequency generation. Appl. Phys. B: Lasers. Opt. 1997, 65, 771.
23. Knake, R.; Jacquinot, P.; Hauser, P.C. Amperometric detection of gaseous formaldehydein the ppb range. Electroanalysis 2001, 13, 631-634.
24. Zhou, Z.-L.; Kang, T.-F.; Zhang, Y.; Cheng, S.-Y. Electrochemical sensor for formaldehyde based on Pt-Pd nanoparticles and a Nafion-modified glassy carbon electrode. Microchim. Acta 2009, 164, 133-138.
25. Knake, R.; Jacquinot, P.; Hodgson, A.W.E.; Hauser, P.C. Amperometric sensing in the gas-phase. Anal. Chim. Acta 2005, 549, 1-9.
26. Chen, T.; Liu, Q.J.; Zhou, Z.L.; Wang, Y.D. The fabrication and gas-sensing characteristics of the formaldehyde gas sensors with high sensitivity. Sens. Actuat. B-Chem. 2008, 131, 301-305.
27. Dirksen, J.A.; Duval, K.; Ring, T.A. NiO thin-film formaldehyde gas sensor. Sens. Actuat. B- Chem. 2001, 80, 106-115.
28. 2-NiO sensitive film for indoor formaldehyde detection. Sens. Actuat. B 2008, 132, 74-80.
29. Bai, Z.; Xie, C.; Hu, M.; Zhang, S. Formaldehyde sensor based on Ni-doped tetrapod-shaped ZnO nanopowder induced by external magnetic field. Physica E. 2008, 41, 235-239.
30. Helwig, A.; Müller, G.; Sberveglieri, G.; Eickhoff, M. On the low-temperature response of semiconductor gas sensors. J. Sens. 2009, doi:10.1155/2009/620720.
31. Yamazoe, N.; Sakai, G.; Shimanoe, K. Oxide semiconductor gas sensors. Catal. Surv. Asia 2003, 7, 63-75.
32. 3. Sens. Actuat. B 2007, 120, 694-699.
33. Bielanski, A.; Haber, J. Oxygen in catalysis on transition metal oxides. Catal. Rev. Sci. Eng. 1979, 19, 1-41.
34. 2-based gas sensor for indoor air quality monitoring. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, 2005; Volume 2, pp 1203-1206.
35. Huang, S.; Qin, H.; Song, P.; Liu, X.; Li, L.; Zhang, R.; Hu, J.; Yan, H.; Jiang, M. The formaldehyde sensitivity of LaFe1-xZnxO3-based gas sensor. J. Mater. Sci. 2007, 42, 9973-9977.
36. 3 nano-materials. Physica B 2005, 370, 259-263.
37. 2. Nanotechnology 2008, 19, 095506.
38. Müller, G.; Friedberger, A.; Kreisl, P.; Ahlers, S.; Schulz, O.; Becker, T. A MEMS toolkit for metal-oxide-based gas sensing systems. Thin Solid Films 2003, 436, 34-45.
39. Hierlemann, A.; Brand, O.; Hagleitner, C.; Baltes, H. Microfabrication techniques for chemical/biosensors. Proc. IEEE 2003, 91, 839-863.
40. Spannhake, J.; Helwig, A.; Schulz, O.; Müller, G. Micro-fabrication of gas sensors. In Solid State Gas Sensing; Springer Science, Business Media, LLC: Berlin, Germany, 2009; pp 1-46.
41. Cavicchi, R.E.; Suehle, J.S.; Kreider, K.G.; Gaitan, M.; Chaparala, P. Fast temperature programmed sensing for micro-hotplate gas sensors. IEEE Electr. Dev. Lett. 1995, 16, 286-288.
42. Lee, C.-Y.; Hsieh, P.-R.; Lin, C.-H.; Chou, P.-C.; Fu, L.-M.; Chiang, C.-M. MEMS-based formaldehyde gas sensor integrated with a micro-hotplate. Microsystem Technol. 2006, 12, 893-898.
43. Lee, C.-Y.; Chiang, C.-M.; Wang, Y.-H.; Ma, R.-H. A self-heating gas sensor with integrated NiO thin-film for formaldehyde detection. Sens. Actuat. B 2007, 122, 503-510.
44. Wang, Y.-H.; Lee, C.-Y.; Lin, C.-H.; Fu, L.-M. Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors. Microsyst. Technol. 2008, 14, 995-1000.
45. Prades, J.D.; Jimenez-Diaz, R.; Hernandez-Ramirez, F.; Barth, S.; Cirera, A.; Romano-Rodriguez, A.; Mathur, S.; Morante, J.R. Ultralow power consumption gas sensors based on self-heated individual nanowires. Appl. Phys. Lett. 2008, 93, 123110-123113.
46. Carp, O.; Huisman, C.L.; Reller, A. Photoinduced reactivity of titanium dioxide. Prog. Solid State Chem. 2004, 32, 33-177.
47. Diebold, U. The surface science of titanium dioxide. Surf. Sci. Rep. 2003, 48, 53-229.
48. Zhao, J.; Yang, X. Photocatalytic oxidation for indoor air purification: a literature review. Bldg. Environ. 2003, 38, 645-654.
49. 2 films for self-detection and decontamination. Int. J. Photoener. 2008, doi:10.1155/2008/343714.
50. 2 and VOCs. Appl. Catal. B. Environ. 2004, 54, 41-50.
51. 2 photocatalysis and related surface phenomena. Surf. Sci. Rep. 2008, 63, 515-582.
52. Peral, J.; Domènech, X.; Ollis, D.F. Heterogeneous Photocatalysis for purification, decontamination and deodorization of air. J. Chem. Technol. Biotechnol. 1997, 70, 117-140.
53. 2 surfaces: principles, mechanisms, and selected results. Chem. Rev. 2002, 95, 735-758.
54. 2 Photocatalysis for indoor air applications: effects of humidity and trace contaminant levels on the oxidation rates of formaldehyde, toluene, and 1,3-butadiene. Environ. Sci. Technol. 2002, 29, 1223-1231.
55. 2 film. Environ. Sci. Technol. 1998, 32, 3831-3833.
56. 2 sensor. J. Photochem. Photobiol. A 2002, 148, 103-108.
57. Peng, L.; Zhao, Q.; Wang, D.; Zhai, J.; Wang, P.; Pang, S.; Xie, T. Ultraviolet-assisted gas sensing: A potential formaldehyde detection approach at room temperature based on zinc oxide nanorods. Sens. Actuat. B 2009, 136, 80-85.
58. Shie, J.-L.; Lee, C.-H.; Chiou, C.-S.; Chang, C.-T.; Chang, C.-C.; Chang, C.-Y. Photodegradation kinetics of formaldehyde using light sources of UVA, UVC and UVLED in the presence of composed silver titanium oxide photocatalyst. J. Hazard Mater. 2008, 155, 164-172.
59. Guijt, R.M.; Breadmore, M.C. Maskless photolithography using UV LEDs. Lab Chip 2008, 8, 1402-1404.
60. Bashir, R. BioMEMS: state-of-the-art in detection, opportunities and prospects. Adv. Drug Delivery Rev. 2004, 56, 1565-1586.
61. Savran, C.A.; Knudsen, S.M.; Ellington, A.D.; Manalis, S.R. Micromechanical detection of proteins using aptamer-based receptor molecules. J. Anal. Chem. 2004, 76, 3194-3198.
62. Ilic, B.; Craighead, H.G.; Krylov, S.; Senaratne, W.; Ober, C.; Neuzil, P. Attogram detection using nanoelectromechanical oscillators. J. Appl. Phys. 2004, 95, 3694-3703.
63. Zougagh, M.; Rios, A. Micro-electromechanical sensors in the analytical field. Analyst 2009, 134, 1274-1290.
64. Albrecht, T.R.; Akamine, S.; Carver, T.E.; Quate, C.F. Microfabrication of cantilever styli for the atomic force microscope. J. Vac. Sci. Technol. A 1990, 8, 3386-3396.
65. Wu, G.; Datar, R.H.; Hansen, K.M.; Thundat, T.; Cote, R.J.; Majumdar, A. Bioassay of prostate-specific antigen (PSA) using microcantilevers. Nat. Biotechnol. 2001, 19, 856-860.
66. Seo, H.; Jung, S.; Jeon, S. Detection of formaldehyde vapor using mercaptophenol-coated piezoresistive cantilevers. Sens. Actuat. B 2007, 126, 522-526.
67. Gunzler, H.; Williams, A. Chemical and biomedical sensors. In Handbook of Analytical Techniques; Wiley-VCH: Weinheim, Germany, 2001.
68. Osada, Y.; De Rossi, D.E. Polymer Sensors and Actuators; Springer: New York, NY, USA, 2000; p. 448.
69. Bai, H.; Shi, G. Gas sensors based on conducting polymers. Sensors 2007, 7, 267-307.
70. Gardner, J.W.; Bartlett, P.N.; Pratt, K.F.E. Modelling of gas-sensitive conducting polymer devices. IEE Proc. Circ., Device. Syst. 1995, 142, 321-333.
71. Wang, X.; Drew, C.; Lee, S.-H.; Senecal, K.J.; Kumar, J.; Samuelson, L.A. Electrospun nanofibrous membranes for highly sensitive optical sensors. Nano. Lett. 2002, 2, 1273-1275.
72. Kwoun, S.J.; Lec, R.M.; Han, B.; Ko, F.K. A Novel Polymer Nanofiber Interface For Chemical Sensor Applications, In 2000 IEEE Frequency Control Symposium and Exhibition, Kansas City, MO, USA, 2000; pp. 52-57.
73. Kwoun, S.J.; Lec, R.M.; Han, B.; Ko, F.K. Polymer Nanofiber Thin Films For Biosensor Applications, In IEEE 27th Annual Northeast Bioengineering Conference, Storrs, CT, USA, 2001; pp. 9-10.
74. Feng, L.; Liu, Y.; Zhou, X.; Hu, J. The fabrication and characterization of a formaldehyde odor sensor using molecularly imprinted polymers. J. Colloid Interface Sci. 2005, 284, 378-382.
75. Mosbach, K.; Ramstrom, O. The Emerging technique of molecular imprinting and its future impact on biotechnology. Nat. Biotechnol. 1996, 14, 163-170.
76. Wulff, G. Enzyme-like catalysis by molecularly imprinted polymers. Chem. Rev. 2001, 102, 1-28.
77. Haupt, K.; Mosbach, K. Molecularly imprinted polymers and their use in biomimetic sensors. Chem. Rev. 2000, 100, 2495-2504.
78. Dickert, F.L.; Forth, P.; Lieberzeit, P.; Tortschanoff, M. Molecular imprinting in chemical sensing -detection of aromatic and halogenated hydrocarbons as well as polar solvent vapors. Fresenius J. Anal. Chem. 1998, 360, 759-762.
79. Gardner, J.W.; Bartlett, P.N.; Pratt, K.F.E. Modelling of gas-sensitive conducting polymer devices. IEEE Proc. Circ. Device. Syst. 1995, 142, 321-333.
80. Chen, H.; Josowicz, M.; Janata, J.; Potje-Kamloth, K. Chemical effects in organic electronics. Chem. Mater. 2004, 16, 4728-4735.
81. Pinto, N.J.; Johnson, A.T.; MacDiarmid, A.G.; Mueller, C.H.; Theofylaktos, N.; Robinson, D.C.; Miranda, F.A. Electrospun polyaniline/polyethylene oxide nanofiber field-effect transistor. Appl. Phys. Lett. 2003, 83, 4244.
82. Laranjeira, J.; Khoury, H.J.; de Azevedo, W.M.; da Silva, E.F., Jr.; de Vasconcelos, E.A. Fabrication of high quality silicon-polyaniline heterojunctions. Appl. Surf. Sci. 2002, 190, 390-394.
83. Gerard, M. Application of conducting polymers to biosensors. Biosens. Bioelectron. 2002, 17, 345-359.
84. Freund, M.S.; Deore, B. Self-Doped Conducting Polymers. Wiley: New York, NY, USA, 2007.
85. Hosono, K.; Matsubara, I.; Murayama, N.; Shin, W.; Izu, N. The sensitivity of 4-ethylbenzenesulfonic acid-doped plasma polymerized polypyrrole films to volatile organic compounds. Thin Solid Films 2005, 484, 396-399.
86. Hosono, K.; Matsubara, I.; Murayama, N.; Woosuck, S.; Izu, N.; Kanzaki, S. Structure and properties of plasma polymerized and 4-ethylbenzenesulfonic acid-doped polypyrrole films. Thin Solid Films 2003, 441, 72-75.
87. Ding, B.; Wang, M.; Yu, J.; Sun, G. Gas sensors based on electrospun nanofibers. Sensors 2009, 9, 1609-1624.
88. Huang, J.; Virji, S.; Weiller, B.H.; Kaner, R.B. Nanostructured polyaniline sensors. Chem-Eur. J. 2004, 10, 1314-1319.
89. Ma, X.; Li, G.; Wang, M.; Cheng, Y.; Bai, R.; Chen, H. Preparation of a nanowire-structured polyaniline composite and gas sensitivity studies. Chem-Eur. J. 2006, 12, 3254-3260.
90. Liu, H.; Kameoka, J.; Czaplewski, D.A.; Craighead, H.G. Polymeric nanowire chemical sensor. Nano. Lett. 2004, 4, 671-675.
91. 2 nano-composite-based trimethylamine QCM sensor and its thermal behavior studies. Sens. Actuat. B 2008, 133, 374-380.
92. 2 composite film with in situ polymerization approach and its gas-sensitivity at room temperature. Mater. Chem. Phys. 2006, 98, 241-247.
93. 3-layered nanohybrids. Bull. Chem. Soc. Jpn. 2004, 77, 1231-1237.
94. Itoh, T.; Matsubara, I.; Woosuck, S.; Izu, N. Highly adhesive layered molybdenum oxide thin films prepared on a silicon substrate using suitable buffer materials. Thin Solid Films 2006, 515, 2709-2716.
95. Itoh, T.; Matsubara, I.; Shin, W.; Izu, N. Preparation and characterization of a layered molybdenum trioxide with poly(o-anisidine) hybrid thin film and its aldehydic gases sensing properties. Bull. Chem. Soc. Jpn. 2007, 80, 1011-1016.
96. 3 with various interlayer organic components. Mater. Lett. 2008, 62, 3021-3023.
97. Itoh, T.; Matsubara, I.; Shin, W.; Izu, N.; Nishibori, M. Preparation of layered organic-inorganic nanohybrid thin films of molybdenum trioxide with polyaniline derivatives for aldehyde gases sensors of several tens ppb level. Sens. Actuat. B 2008, 128, 512-520.