Silicon-based micro-gas sensors for detecting formaldehyde

Sensors and Actuators, B: Chemical

Volumn 136, Issue 2, 2009, Pages 399-404

  Wang, Jing ^a   Zhang, Peng ^a   Qi, Jin Qing ^a   Yao, Peng Jun ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Detection; Formaldehyde; Gas sensor; Silicon based

Indexed keywords

CHEMICAL SENSORS; ERROR DETECTION; FINITE ELEMENT METHOD; FORMALDEHYDE; GAS DETECTORS; GASES; SEMICONDUCTOR DOPING; SILICON; SOL-GEL PROCESS; SOL-GELS; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

FINITE ELEMENT SOFTWARE; LATTICE OXYGEN; MICRO-GAS SENSORS; SILICON SUBSTRATES; SILICON-BASED; THERMAL FIELD DISTRIBUTION; XPS SPECTRA;

PALLADIUM;

EID: 76949107085     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.12.056     Document Type: Article

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