Effect of substrate temperature on the electrically conductive stability of sputtered NiO films

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5444-5447

  Jang, Wei Luen ^a   Lu, Yang Ming ^b   Hwang, Weng Sing ^a   Hsiung, Tung Li ^a   Wang, H Paul ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL UNIVERSITY OF TAINAN   (Taiwan)

Author keywords

Electrical aging; NiO film; Sputter

Indexed keywords

CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY; MAGNETIC PROPERTIES; NICKEL; NICKEL OXIDE; SURFACE STRUCTURE;

AGING RATES; ELECTRICAL AGEING; ELECTRICAL AGING; ELECTRICAL CONDUCTIVITY; ELECTRICALLY CONDUCTIVE; ELEVATED TEMPERATURES; HUMID AIR; NIO FILM; NIO FILMS; OPTICAL-; P-TYPE SEMICONDUCTORS; POINT OF APPLICATION; PREFERRED ORIENTATION; SPUTTER; SUBSTRATE TEMPERATURE;

SUBSTRATES;

EID: 50349085606     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.025     Document Type: Article

References (13)

1. Sato H., Minami T., Takata S., and Yamada T. Thin Solid Films 236 (1993) 27
2. Jiang S.R., Yang P.X., Feng B.X., Cai X.M., and Wang J. Materials Chemistry and Physics 77 (2002) 384
3. Kadam L.D., and Patil P.S. Solar Energy Materials & Solar Cells 69 (2001) 361
4. Dirksen J.A., Duval K., and Ring T.A. Sensors and Actuators B 80 (2001) 106
5. Chen H.L., Lu Y.M., and Hwang W.S. Surface & coatings Technology 198 (2005) 138
6. Jang W.L., Hwang W.S., and Lu Y.M. Proceedings of the 9th International Symposium on Sputtering and Plasma Processes (2007) 139 Japan
7. Kitakatsu N., Maurice V., Hinnen C., and Marcus P. Surface Science 407 (1998) 36
8. Wang W., Li J., and Zhang Y. Applied Surface Science 252 (2006) 2673
9. Kohmoto O., Nakagawa H., Isagawa Y., and Chayahara A. Journal of magnetism and magnetic materials 226-230 (2001) 1629
10. Hotový I., Janik J., and Kobzev A.P. Vacuum 51 (1998) 157
11. Ryu H.W., Choi G.P., Hong G.J., and Sark J. Japanese Journal of Applied Physics 43 (2004) 5524
12. Marra W.C., Eisenberger P., and Cho A.Y. Journal of Applied Physics 50 (1979) 6927
13. Toney M.F., Huang T.C., Brennan S., and Rek Z. Journal of Materials Research 3 (1988) 351