Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor

Sensors and Actuators, B: Chemical

Volumn 80, Issue 2, 2001, Pages 125-131

  Sakai, Go ^a   Matsunaga, Naoki ^a   Shimanoe, Kengo ^a   Yamazoe, Noboru ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Diffusion equation; Knudsen diffusion; Temperature dependence

Indexed keywords

ACTIVATION ENERGY; DIFFUSION IN GASES; REACTION KINETICS; THERMAL EFFECTS; THIN FILMS; TRANSPORT PROPERTIES;

GAS TRANSPORT PHENOMENA; TEMPERATURE DEPENDANCE;

CHEMICAL SENSORS;

EID: 0035923362     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00890-5     Document Type: Article

References (19)

1. A new detector for gaseous components using semiconductive thin films
2. 2
3. 2-based elements
4. 2 sensor
5. 2-based sensors on their sensing properties
6. 2-based sensors
7. Solid state gas sensors
8. Effect of electrode geometry on sensor response
9. Reaction-diffusion effects and systematic design of gas-sensitive resistors based on semiconducting oxides
10. Theory of self-diagnostic sensor array devices using gas-sensitive resistors
11. Analysis of the conductance transient in thick-film tin oxide gas sensors
12. Diffusion-reaction theory for conductance response in metal oxide gas sensing thin films
13. 2 sensitivity on film thickness
14. 2 response on film thickness
15. 2 sol