Properties of nanocrystalline Al-Cu-O films reactively sputtered by DC pulse dual magnetron

Applied Surface Science

Volumn 258, Issue 5, 2011, Pages 1762-1767

  Blazek J ^a   Musil, J ^a   Stupka, P ^a   Cerstvy R ^a   Houska J ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Cu addition; Elasticity; Mechanical properties; Pulse reactive sputtering; Resistance to cracking

Indexed keywords

ALUMINA; ALUMINUM; ALUMINUM OXIDE; CRACKS; ELASTIC MODULI; ELASTICITY; MAGNETRONS; MECHANICAL PROPERTIES; NANOCRYSTALS; OPTICAL PROPERTIES; REACTIVE SPUTTERING;

CU ADDITION; DUAL MAGNETRONS; ELASTIC RECOVERY; HIGH HARDNESS; NANOCRYSTALLINE AL; NANOCRYSTALLINE SOLIDS; RESISTANCE TO CRACKING; SPINEL STRUCTURE;

COPPER;

EID: 81555200098     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.10.039     Document Type: Article

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