Thermal stability and phase transformations of γ-/amorphous-Al 2O3 thin films

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Eklund, Per ^a,b   Sridharan, Madanagurusamy ^a,c   Singh, Gurvinder ^a   Bøttiger, Jørgen ^a  

^a AARHUS UNIVERSITY   (Denmark)

^b LINKÖPING UNIVERSITY   (Sweden)

^c SASTRA UNIVERSITY   (India)

Author keywords

Annealing; Atomic force microscopy (afm); Faceting; Sputtering; X ray diffraction (xrd)

Indexed keywords

AMBIENT AIR; AS-DEPOSITED FILMS; ATOMIC FORCE MICROSCOPY (AFM); INTERMEDIATE PHASE; MATRIX; NANOCRYSTALLINES; PHASE FRACTIONS; PHASE TRANSFORMATION; THERMAL STABILITY;

ALUMINUM; ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; INTERMETALLICS; MAGNETRONS; PHASE STABILITY; THIN FILMS; X RAY DIFFRACTION;

AMORPHOUS FILMS;

EID: 77953126806     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200932301     Document Type: Conference Paper

References (24)

1. I. Levin, D. Brandon, J. Am. Ceram. Soc. 1998, 81, 1995.
2. J. M. McHale, A. Auroux, A. J. Perrotta, A. Navrotsky, Science 1997, 277, 788.
3. S. Ruppi, Int. J. Refract. Met. Hard Mater. 2005, 23, 306.
4. P. Jin, G. Xu, M. Tazawa, K. Yoshimura, D. Music, J. Alami, U. Helmersson, J. Vac. Sci. Technol. A 2002, 20, 2134.
5. J. M. Andersson, Zs. Czigány, P. Jin, U. Helmersson, J. Vac. Sci. Technol. A 2004, 22, 117.
6. P. Eklund, M. Sridharan, M. Sillassen, J. Bpttiger, Thin Solid Films 2008, 516, 7447.
7. M. Witthaut, R. Cremer, K. Reichert, D. Neuschütz, Mikrochim. Acta 2000, 133, 191.
8. J. Ramm, M. Ante, T. Bachmann, B. Widrig, H. Brandie, M. Döbeli, Surf. Coat Technol. 2007, 202, 876.
9. J. Ramm, M. Ante, H. Brandie, A. Neels, A. Dommann, M. Döbeli, Adv. Eng. Mater. 2007, 9, 604.
10. D. E. Ashenford, F. Long, W. E. Hagston, B. Lunn, A. Matthews, Surf. Coat Technol. 1999, 116, 699.
11. E. Wallin, T. I. Selinder, M. Elfwing, U. Helmersson, Europhys. Lett. 2008, 82, 36002.
12. A. N. Cloud, S. Canovic, H. H. Abu-Safe, M. H. Gordon, M. Halvarsson, Surf. Coat Technol. 2008, 203, 808.
13. J. M. Schneider, W. D. Sproul, A. A. Voevodin, A. Matthews, J. Vac. Sci. Technol. A 1997, 5, 1084.
14. A. Khanna, D. G. Bhat, Surf. Coat Technol. 2006, 201, 168.
15. K. Bobzin, E. Lugscheider, M. Maes, C. Pinero, Thin Solid Films 2006, 494, 255.
16. M. Sridharan, M. Sillassen, J. Bøttiger, J. Chevallier, H. Birkedal, Surf. Coat Technol. 2007, 202, 920.
17. U. Helmersson, M. Lattemann, J. Bohlmark, A. P. Ehiasarian, J. T. Gudmundsson, Thin Solid Films 2006, 513, 1.
18. S. M. Rossnagel, J. Hopwood, J. Vac. Sci. Technol. B 1994, 12, 449.
19. T. C. Chou, T. G. Nieh, J. Am. Ceram. Soc. 1991 74, 2270.
20. T. C. Chou, T. G. Neih, Ser. Metall. Mater. 1992, 26, 1895.
21. T. C. Chou, D. Adamson, J. Mardinly, T. G. Nieh, Thin Solid Films 1991, 205, 131.
22. T. C. Chou, T. G. Nieh, Thin Solid Films 1992, 221, 89.
23. M. Iaponeide, F. Macedo, C. A. Bertran, C. C. Osawa, J. Mater. Sci. 2007, 42, 2830.
24. D. H. Trinh, H. Högberg, J. M. Andersson, M. Collin, I. Reineck, U. Helmersson, L. Hultman, J. Vac. Sci. Technol. A 2006, 24, 309.