Calibration approach for thermomechanical in-plane microactuator self-sensing

Proceedings of the ASME Design Engineering Technical Conference

Volumn 4, Issue , 2008, Pages 633-640

  Teichert, Kendall B ^a   Jensen, Brian D ^a  

^a Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION METHOD; ELECTRICAL CHARACTERISTIC; EXPERIMENTAL UNCERTAINTY; GENERAL MODEL; IN-PLANE; MATERIAL PROPERTY; MEMS APPLICATIONS; ON CHIPS; PIEZO-RESISTIVE; SELF-SENSING; SENSING SIGNALS; TEST DATA; TEST STRUCTURE; THERMO-MECHANICAL; VALIDATION APPROACH;

CALIBRATION; MICROACTUATORS; NANOSYSTEMS; THERMAL INSULATING MATERIALS;

STRUCTURAL DESIGN;

EID: 81155154346     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2008-49546     Document Type: Conference Paper

References (20)

1. Bell, D., Lu, T., Fleck, N., and Spearing, S., 2005. "MEMS actuators and sensors: observations on their performance and selection for purpose". Journal of Micromechanics and Microengineering, 15(3).
2. Que, L., Park, J.-S., and Gianchandani, Y., 2001. "Bentbeam electrothermal actuators-part I: Single beam and cascaded devices". Journal of Microelectromechanical Systems, 10(2), pp. 247 - 254. (Pubitemid 32576466)
3. Park, J.-S., Chu, L., Siwapornsathain, E., Oliver, A., and Gianchandani, Y., 2000. "Long throw and rotary output electro-thermal actuators based on bent-beam suspensions". Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), pp. 680 - 685.
4. Cragun, R., and Howell, L., 1999. "Linear thermomechanical microactuators". In The 1999 ASME International Mechanical Engineering Congress and Exposition, pp. 181- 188.
5. Johnstone, R., and Parameswaran, M., 2004. "Modelling surface-micromachined electrothermal actuators". Electrical and Computer Engineering, Canadian Journal of, 29(3), pp. 193-202.
6. Huang, Q.-A., and Lee, N. K. S., 1999. "Analysis and design of polysilicon thermal flexure actuator". Journal of Micromechanics and Microengineering, 9(1), pp. 64 - 70.
7. Chen, S., and Culpepper, M., 2006. "Design of Contoured Micro-scale Thermomechanical Actuators". Microelectromechanical Systems, Journal of, 15(5), pp. 1226- 1234. (Pubitemid 44566941)
8. Lott, C., McLain, T., Harb, J., and Howell, L., 2002. "Modeling the thermal behavior of a surfacemicromachined linear-displacement thermomechanical microactuator". Sensors & Actuators: A. Physical, 101(1-2), pp. 239-250.
9. Sinclair, M., 2000. "A high force low area MEMS thermal actuator". The Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems. ITHERM 2000., 1, pp. 127-132.
10. Smith, C. S., 1954. "Piezoresistance effect in germanium and silicon". Physical Review, 94, pp. 42-49.
11. Waterfall, T., Teichert, K., and Jensen, B., 2007. "Simultaneous on-chip sensing and actuation using the thermomechanical in-plane microactuator". In DETC 2007 ASME 2007 International Design Engineering Technical Conferences, no. DETC2007-34982.
12. Buehler, M., Grant, S., and Thurber, W., 1978. "Bridge and van der Pauw Sheet Resistors for Characterizing the Line Width of Conducting Layers". Journal of The Electrochemical Society, 125, p. 650.
13. Geisberger, A., Sarkar, N., Ellis, M., and Skidmore, G., 2003. "Electrothermal properties and modeling of polysilicon microthermal actuators". Journal of Microelectrome-chanical Systems, 12(4), pp. 513-523.
14. Okada, Y., and Tokumaru, Y., 1984. "Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K". Journal of Applied Physics, 56, p. 314.
15. Koester, D. A., Mahadevan, R., Hardy, B., and Markus, K., 2000. MUMPs Design Handbook, Rev. 5.0. Cronos Integrated Microsystems.
16. Teichert, K. B., 2008. "Multi-physics modeling and calibration for enabling of self-sensing of the thermomechanical in-plane microactuator". Master's thesis, Brigham Young University.
17. Hubbard, N. B., and Howell, L. L., 2004. "Experimental repeatability of a thermal actuator for nanopositioning". pp. 427 - 430.
18. Waterfall, T., 2006. "Design of piezoresistive mems force and displacement sensors". Master's thesis, Brigham Young University.
19. Wittwer, J. W., 2005. "Simulation-based design under uncertainty for compliant microelectromechanical systems". PhD thesis, Brigham Young University, Provo, UT.
20. Wittwer, J. W., Gomm, T., and Howell, L. L., 2002. "Surface micromachined force gauges: uncertainty and reliability". Journal of Micromechanics and Microengineering, 12, pp. 13-20. (Pubitemid 34090229)