Modelling surface-micromachined electrothermal actuators

Canadian Journal of Electrical and Computer Engineering

Volumn 29, Issue 3, 2004, Pages 193-202

  Johnstone, R W ^a   Parameswaran, M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

ANSYS; Electrothermal actuator; Material parameters; Modelling; Mumps

Indexed keywords

ANSYS; ELECTROTHERMAL ACTUATORS; MATERIAL PARAMETERS; MODELLING; MUMPS;

AMORPHIZATION; ANNEALING; BOUNDARY CONDITIONS; COMPUTER SIMULATION; COMPUTER SOFTWARE; CRYSTALLINE MATERIALS; ELASTICITY; ELECTRIC CONDUCTIVITY; GRAIN SIZE AND SHAPE; MATHEMATICAL MODELS; POLYSILICON; SINGLE CRYSTALS; STIFFNESS; THERMAL CONDUCTIVITY; VAPOR DEPOSITION;

ACTUATORS;

EID: 4043059439     PISSN: 08408688     EISSN: None     Source Type: Journal    
DOI: 10.1109/CJECE.2004.1532523     Document Type: Review

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