Simultaneous on-chip sensing and actuation using the thermomechanical in-plane microactuator

2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007

Volumn 3 PART B, Issue , 2008, Pages 829-834

  Waterfall, Tyler ^a   Teichert, Kendall ^a   Jensen, Brian ^a  

^a Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

(+ MOD 2N) OPERATION; BIOLOGICAL CELLS; DESIGN THEORY AND METHODOLOGY; EXPERIMENTAL EVIDENCE; IN-PLANE (IP); INTERNATIONAL CONFERENCES; INTERNATIONAL DESIGNS; MICRO ACTUATORS; MICRO AND NANO SYSTEMS; MICRO-ELECTRO- MECHANICAL SYSTEM (MEMS); ON CHIPS; TECHNICAL CONFERENCES;

ARCHITECTURAL DESIGN; COMPUTER NETWORKS; COMPUTERS; DETECTORS; ELECTRIC POTENTIAL; ELECTROMECHANICAL DEVICES; ENGINEERING; INFORMATION SYSTEMS; KETONES; LEAD; MEMS; MICROELECTROMECHANICAL DEVICES; MICROFLUIDICS; MICROSENSORS; NANOSYSTEMS; SENSORS; TECHNOLOGY;

ACTUATORS;

EID: 44849108578     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2007-34982     Document Type: Conference Paper

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