Characterization of Epoxy Resin SU-8 Film Using Thickness-Shear Mode (TSM) Resonator

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2003, Pages 986-992

  Jiang, Lizhong ^a   Hossenlopp, Jeanne ^b   Cernosek, Richard ^c   Josse, Fabien ^a  

^a Marquette University   (United States)

^b Marquette University   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POLYMER FILMS; THICKNESS SHEAR MODES (TSM);

ACOUSTIC SURFACE WAVE DEVICES; COMPUTER SIMULATION; CRYSTAL RESONATORS; FREQUENCY STABILITY; MATHEMATICAL MODELS; PLASTICIZERS; QUARTZ; SHEAR STRENGTH; SOLUTIONS; THICKNESS MEASUREMENT; THIN FILMS; VISCOELASTICITY; WATER ABSORPTION;

EPOXY RESINS;

EID: 1542335643     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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