Building embedded microchannels using a single layered SU-8, and determining Young's modulus using a laser acoustic technique

Journal of Micromechanics and Microengineering

Volumn 14, Issue 11, 2004, Pages 1576-1584

  Yu, Hui ^a   Balogun, Oluwaseyi ^a   Li, Biao ^a   Murray, Todd W ^a   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MICROSCOPES; ALGORITHMS; ELASTIC MODULI; FABRICATION; LASER PULSES; MICROSTRUCTURE; SCANNING; THICKNESS CONTROL; ULTRASONIC WAVES;

MICROBEAMS; MICROCHANNELS; SCANNING LASER SYSTEMS; SURFACE ACOUSTIC WAVES (SAW);

SURFACE WAVES;

EID: 9644304512     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/11/020     Document Type: Article

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