Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 9, Issue 1, 2010, Pages

  Chung, Yung Chiang ^a   Hess, Guo Yuan ^b   Yeh, Fu Wen ^b   Han, Hsieh Cheng ^c   Chen, Chien Yuan ^c   Lee, Ching Jiun ^d   Sheen, Horn Jiunn ^d   Yang, Lung Jieh ^b  

^a MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b TAMKANG UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Hydrophilic; Hydrophobic; Parylene; Plasma; Surface ratchets

Indexed keywords

AUTOMOBILE DRIVERS; DROPS; FLUORINE; HYDROPHILICITY; HYDROPHOBICITY; SULFUR HEXAFLUORIDE;

ARRAY SURFACE; DRIVING PERFORMANCE; HEXAMETHYLDISILAZANE; HYDROPHILIC; HYDROPHOBIC; MICRO PILLARS; PARYLENES; TESTING OF SURFACE;

SURFACE TESTING;

EID: 80455158312     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3280261     Document Type: Article

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