Surface properties of platinum thin films as a function of plasma treatment conditions

Surface Science

Volumn 529, Issue 3, 2003, Pages 410-418

  Li, Zhiyong ^a   Beck, Patricia ^a   Ohlberg, Douglas A A ^a   Stewart, Duncan R ^a   Williams, R Stanley ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

Atomic force microscopy; Metallic films; Plasma processing; Platinum; Surface structure, morphology, roughness, and topography; X ray photoelectron spectroscopy

Indexed keywords

PLASMA APPLICATIONS; PLATINUM; REFRACTIVE INDEX; SURFACE ROUGHNESS; THIN FILMS; WETTING; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA TREATMENT;

SURFACE PROPERTIES;

EID: 0037430873     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(03)00015-3     Document Type: Article

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