Effect of oxygen plasma treatment on adhesion improvement of Au deposited on Pa-c substrates

Journal of the Korean Physical Society

Volumn 44, Issue 5 I, 2004, Pages 1177-1181

  Lee, Jeong Hoon ^a   Hwang, Kyo Seon ^a   Kim, Tae Song ^a   Seong, Jin Wook ^b   Yoon, Ki Hyun ^b   Ahn, Saeyoung ^c  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

Au adhesion; Oxygen plasma; Parylene; Surface energy; Surface roughness

Indexed keywords

EID: 2942673234     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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