Photo-patternable gelatin as protection layers in low-temperature surface micromachinings

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 284-290

  Yang, Lung Jieh ^a   Lin, Wei Zhi ^a   Yao, Tze Jung ^b   Tai, Yu Chong ^b  

^a TAMKANG UNIVERSITY   (Taiwan)

^b California Institute of Technology   (United States)

Author keywords

Gelatin; Low temperature process; Parylene; Stiction

Indexed keywords

CHEMICAL RESISTANCE; LOW TEMPERATURE OPERATIONS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PHOTORESISTS; PROTECTIVE COATINGS; STICTION; THICK FILMS;

GELATIN;

MICROMACHINING;

EID: 0037438988     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00338-2     Document Type: Conference Paper

References (8)

1. X.Q. Wang, et al., Parylene micro check valve, in: Proceedings of the Technical Digest of 12th IEEE International Conference on MEMS, Florida, USA, January 17, 1999, pp. 177-182.
2. T.N. Pornsin-Sirirak, et al., Flexible parylene actuator for micro adaptive flow control, in: Proceedings of the Technical Digest of 14th IEEE International Conference on MEMS, Interlaken, Switzerland, January 21, 2001, pp. 511-514.
3. 3 dry release technology for large freestanding parylene microstructures and electrostatic actuators, Sens. Actuators A 97-98 (2002) 771-775.
4. Website: http://www.gelita.com/DGF-english.
5. W.A. Little, Microminiature refrigeration, Rev. Sci. Instrnm. 55 (5) (1984) 661-680.
6. J.C. Angus, et al., Controlled electroplating through gelatin films, J. Electrochem. Soc. 133 (6) (1986) 1152-1160.
7. A. Veis, The Macromolecular Chemistry of Gelatin, Academic Press, New York, 1964, p. 29.
8. E. Ermantraut, et al., Perforated support foils with pre-defined hole size, shape and arrangement, Ultramicroscopy 74 (1998) 75-81.