Optimizing geometrical design of superhydrophobic surfaces for prevention of Microelectromechanical System (MEMS) Stiction

Proceedings - Electronic Components and Technology Conference

Volumn 2006, Issue , 2006, Pages 1129-1135

  Zhu, Lingbo ^a   Xiu, Yonghao ^a   Xu, Jianwen ^a   Hess, Dennis W ^a   Wong, C P ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FORCES; ELECTROSTATIC FORCES; MICROELECTROMECHANICAL SYSTEM (MEMS) STICTION; SURFACE SMOOTHNESS;

ADHESION; ELECTROSTATICS; FABRICATION; HYDROGEN BONDS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; VAN DER WAALS FORCES;

STICTION;

EID: 33845586285     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTC.2006.1645795     Document Type: Conference Paper

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