Hydrophobic coatings for MEMS applications

Journal of Micromechanics and Microengineering

Volumn 18, Issue 5, 2008, Pages

  Doms, M ^a   Feindt, H ^a   Kuipers, W J ^a   Shewtanasoontorn, D ^a   Matar, A S ^a   Brinkhues, S ^a   Welton, R H ^a   Mueller, J ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BOROSILICATE GLASS; HYDROPHOBICITY; PLASMA POLYMERIZATION; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

ACETONE ULTRASONIC BATH; HYDROPHOBIC COATINGS;

MEMS;

EID: 42549171016     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/5/055030     Document Type: Article

References (27)

1. Doms M and Müller J 2005 A micromachined vapor-jet-pump Sensors Actuators A 119 462-7
2. Abe T, Messner W C and Reed M L 1995 Effects of elevated temperature treatments in microstructure release procedures IEEE J. MEMS 4 66-75
3. Alley R L, Mai P, Komvopoulos K and Howe R T 1993 Surface roughness modification of interfacial contacs in polysilicon microstructures Proc. 7th Int. Conf. Solid-state Sensors and Actuators pp 288-92
4. Mastrangelo C H and Saloka G S 1993 A dry-release method based on polymer columns for microstructure fabrication Proc. IEEE MEMS Workshp. pp 77-81
5. Mulhern G T, Soane D S and Howe R T 1993 Supercritical carbon dioxide drying of microstructures Proc. 7th Int. Conf. Solid-state Sensors and Actuators pp 296-300
6. Guckel H, Sniegowski J J, Christenson T R and Raissi F 1990 The application of fine-grained tensile polysilicon to mechanically resonant transducers Sensors Actuators A 21 346-35
7. Legtenberg R 1996 Electrostatic actuators fabricated by surface micromachining techniques Dissertation University of Twente
8. Orpana M and Korhonen A O 1991 Control of residual stress of polysilicon thin films by heavy doping in surface micromachining Proc. 6th Int. Conf. Solid-state Sensors and Actuators pp 957-60
9. Kozlowski F, Lindmair N, Scheiter T, Hierold C and Lang W 1995 A novel method to avoid sticking of surface micromachined structures Proc. 8th Int. Conf. Solid-state Sensors and Actuators pp 220-3
10. Butt H J, Graf K and Kappl M 2003 Physics and Chemistry of Interfaces (Weinheim: Wiley-VCH)
11. Dyneon Company 2000 Dyneon PFA 6902N Technical Information (Burgkirchen: Dyneon Company)
12. Dyneon Company 2003 Dyneon Polytetrafluroethylene Product Comparison Guide (Burgkirchen: Dyneon Company)
13. Power G, Vij J K and Shaw M 2004 Refractive index at infrared wavelengths and dielectric permittivity of pure and fluorinated silicon dioxide from measurements of their thin films deposited on Si J. Phys. D: Appl. Phys. 37 1362-70
14. Yasuda H 1985 Plasma Polymerization (London: Harcourt Brace Jovanovich)
15. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley Interscience)
16. Bariya A J 1990 Deposition kinetics and characteristics of flurocarbon plasma polymer films and their role in dry etching Dissertation Stanford University
17. Chen F F and Chang J P 2003 Lecture Notes on Principles of Plasma Processing (New York: Kluwer/Plenum)
18. Ashurst W R, Carraro C and Maboudin R 2003 Vapor phase anti-striction coatings for MEMS IEEE Trans. Device Mater. Reliab. 3 173-8
19. Ashurst W R, Carraro C, Chinn J D, Fuentes V, Kobrin B, Maboudin R, Nowak R and Yi R 2004 Improved vapor-phase deposition technique for anti-stiction monolayers Proc. SPIE 5342 204-11
20. Maboudian R 1998 Surface processes in MEMS technology Surf. Sci. Rep. 30 207-69
21. Brzoska J B, Ben Azouz I and Rondelez F 1994 Silanization of solid substrate: a step toward reproducibility Langmuir 10 4367-73
22. Owens D K 1969 Estimation of the surface free energy of polymers J. Appl. Polym. Sci. 13 1741-7
23. Khoo H S, Huang T W, Chen Y F, Chen M H, Hsu T H and Tseng F G 2007 Improved hydrophobicity of vapor coated chlorosilane self-assembled monolayers using evaporative drying of solvent and annealing Transducers: Int. Conf. Solid-state Sensors and Actuators 2007 pp 11629-32
24. Barber A H, Cohen S R and Wagner H D 2004 Static and dynamic wetting measurements of single carbon nanotubes Phys. Rev. Lett. 92 186103
25. Lau K K S et al 2003 Superhydrophobic carbon nanotube forests Nano Lett. 3 1701-5
26. Meyyappan M et al 2003 Carbon nanotube growth by PECVD: a review Plasma Sources Sci. Technol. 12 205-16
27. Sussiek M and Mueller J 2003 Carbon nanotubes as adsorbent in packed columns for a miniaturised gas chromatograph Proc. Sensor pp 117-9