Fabrication of three-dimensional microfluidic systems by stacking molded polydimethylsiloxane (PDMS) layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3877, Issue , 1999, Pages 222-229

  Jo, Byung Ho ^a   Beebe, David J ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; HYDROPHOBICITY; METHANOL; PHOTORESISTS; PLASTIC FILMS; REACTIVE ION ETCHING; SILICON WAFERS; SILICONES;

HYDROPHILICITY; MICROFLUIDIC SYSTEMS; POLYDIMETHYLSILOXANE;

FLUIDICS;

EID: 0033326251     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)