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Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 241-246

Buckled-type valves integrated by parylene micro-tubes

(5) Yang, Lung Jieh a Wang, Hsin Hsiung a Wang, Jiun Min a Liu, Kuan Chun a Ko, Kai Chung a

a TAMKANG UNIVERSITY (Taiwan)

Author keywords

Buckled type valve; Circular microchannel; Parylene; SU 8

Indexed keywords

BUCKLING; CAPILLARITY; FORMABILITY; MOLDS; PHOTOLITHOGRAPHY; PLASTIC PRODUCTS;

BUCKLED-TYPE VALVES; CIRCULAR MICROCHANNELS; PARYLENE; SU-8;

VALVES (MECHANICAL);

EID: 33745870816 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/j.sna.2006.01.046 Document Type: Article

Times cited : (6)

References (8)

1
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- Surface micromachined leakage proof Parylene check valve
- Interlaken, Switzerland, January 21-25
- Xie J., Yang X., Wang X.-Q., and Tai Y.-C. Surface micromachined leakage proof Parylene check valve. Fourteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS'01). Interlaken, Switzerland, January 21-25 (2001) 539-542
- (2001) Fourteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS'01) , pp. 539-542
- Xie, J.¹ Yang, X.² Wang, X.-Q.³ Tai, Y.-C.⁴

2
- 16244413960
- Compact chemical-resistant microvalve array using parylene membrane and pneumatic actuation
- August 25-27
- Hua Z., Srivannavit O., Xia Y., and Gulari E. Compact chemical-resistant microvalve array using parylene membrane and pneumatic actuation. Proceedings, International Conference on MEMS, NANO and Smart Systems (ICMENS). August 25-27 (2004) 64-68
- (2004) Proceedings, International Conference on MEMS, NANO and Smart Systems (ICMENS) , pp. 64-68
- Hua, Z.¹ Srivannavit, O.² Xia, Y.³ Gulari, E.⁴

3
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- McGraw-Hill, New York p. 823
- Kovacs G.T.A. Micromachined Transducers Sourcebook. first ed. (1998), McGraw-Hill, New York p. 823
- (1998) Micromachined Transducers Sourcebook. first ed.
- Kovacs, G.T.A.¹

4
- 33745849821
- The private communication of Dr. T.-J. Yao with authors of this paper in 2001.

5
- 0036544388
- 3 dry release technology for large freestanding parylene microstructures and electrostatic actuators
- 3 dry release technology for large freestanding parylene microstructures and electrostatic actuators. Sens. Actuators A: Phys. 97-98 (2002) 771-775
- (2002) Sens. Actuators A: Phys. , vol.97-98 , pp. 771-775
- Yao, T.-J.¹ Yang, X.² Tai, Y.-C.³

6
- 2442583482
- Fabrication of SU-8 embedded microchannels with circular cross-section
- Yang L.-J., Chen Y.-T., Kang S.-W., and Wang Y.-C. Fabrication of SU-8 embedded microchannels with circular cross-section. Int. J. Mach. Tools Manuf. 44 (2004) 1109-1114
- (2004) Int. J. Mach. Tools Manuf. , vol.44 , pp. 1109-1114
- Yang, L.-J.¹ Chen, Y.-T.² Kang, S.-W.³ Wang, Y.-C.⁴

7
- 0027202853
- In situ monitoring and universal modeling of sacrificial PSG etching using hydrofluoric acid
- Fort Lauderdale, Florida, February 7-10
- Liu J., Tai Y.-C., Lee J., Pong K.-C., Zohar Y., and Ho C.-M. In situ monitoring and universal modeling of sacrificial PSG etching using hydrofluoric acid. Proceedings, IEEE Micro Electro Mechanical Systems Workshop (MEMS'93). Fort Lauderdale, Florida, February 7-10 (1993) 71-76
- (1993) Proceedings, IEEE Micro Electro Mechanical Systems Workshop (MEMS'93) , pp. 71-76
- Liu, J.¹ Tai, Y.-C.² Lee, J.³ Pong, K.-C.⁴ Zohar, Y.⁵ Ho, C.-M.⁶

8
- 0034996864
- Dissolution of photoresist sacrificial layers in parylene microchannels
- Interlaken, Switzerland, January 21-25
- Walsh K., Norville J., and Tai Y.-C. Dissolution of photoresist sacrificial layers in parylene microchannels. Fourteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS'01). Interlaken, Switzerland, January 21-25 (2001) 114-117
- (2001) Fourteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS'01) , pp. 114-117
- Walsh, K.¹ Norville, J.² Tai, Y.-C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.