MEMS strain sensors for intelligent structural systems

Lecture Notes in Electrical Engineering

Volumn 96, Issue , 2011, Pages 63-74

  Senesky, Debbie G ^a   Jamshidi, Babak ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

MEMS; sensors; strain sensing; stress; structural monitoring

Indexed keywords

CATASTROPHIC FAILURES; CRITICAL COMPONENT; DESIGN CONSIDERATIONS; DESIGN ROBUSTNESS; DEVICE PERFORMANCE; LIGHTWEIGHT DESIGN; LONG TERM DRIFT; MECHANICAL STRUCTURES; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; OIL AND GAS; OPERATION BANDWIDTH; PERFORMANCE IMPROVEMENTS; REAL TIME MONITORING; REDUCED SENSITIVITY; SENSING TECHNOLOGY; STRAIN SENSING; STRAIN SENSORS; STRUCTURAL MONITORING; STRUCTURAL SYSTEMS; TEMPERATURE COMPENSATION;

COMPOSITE MICROMECHANICS; DESIGN; MEMS; MICROELECTROMECHANICAL DEVICES; REAL TIME SYSTEMS; SENSORS; STRESS CONCENTRATION;

STRAIN;

EID: 80455158260     PISSN: 18761100     EISSN: 18761119     Source Type: Book Series    
DOI: 10.1007/978-3-642-21099-0_4     Document Type: Review

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