High-gain mechanically amplified capacitive strain sensor

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 464-467

  Guo, Jun ^a   Suster, Michael ^a   Young, Darrin J ^a   Ko, Wen H ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; COMPUTER SIMULATION; CONTROL NONLINEARITIES; FINITE ELEMENT METHOD; GAIN CONTROL; OPTIMIZATION;

BUCKLED BEAM SUSPENSIONS; CAPACITIVE STRAIN SENSORS; MECHANICAL AMPLIFICATION; NONLINEAR ELECTRONICS;

MICROSENSORS;

EID: 33847322082     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597736     Document Type: Conference Paper

References (4)

1. J. Guo, H. Kuo, D. J. Young and W. H. Ko, "Buckled beam linear output capacitive strain sensor." Solid-state Sensor, Acutuator and Microsystems Workshop 2004 at Hilton Head, pp. 399-403, June 2004.
2. M. Suster, J. Quo, N. Chaimanonart, W. Ko, and D. Young, "Low-Noise CMOS integrated sensing electronics for capacitive MEMS strain sensors," IEEE Custom Integrated Circuits Conferenc, pp. 693-696, October 2004.
3. S. P. Timoshenko and S. woiniwsky-Krieger, "Theory of Plates and shells", 2nd edition, McGraw-Hill, 1970.
4. Yogesh B. Gianchandani and Khalil Najafi, "Bent-beam strain sensors", JMEMS, VOL. 5, No. 1, pp. 52-58, March 1996.