Enhanced cross-axis rejection capacitive strain gauge

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 11, Issue , 2007, Pages 535-539

  Jamshidi, Babak ^a   Azevedo, Robert G ^a   Jog, Anand V ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITANCE MEASUREMENT; FINITE ELEMENT METHOD; NANOSYSTEMS; PLATES (STRUCTURAL COMPONENTS); STRAIN GAGES; STRUCTURAL DESIGN;

CAPACITIVE MEASUREMENTS; CAPACITIVE PLATE; CROSS-AXIS SENSITIVITY; FINITE ELEMENT SIMULATIONS; MECHANICAL ANALYSIS; NOISE ASSESSMENTS; PARASITIC CAPACITANCE; SILICON-ON-INSULATORS;

SHEAR STRAIN;

EID: 84928606662     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE200743168     Document Type: Conference Paper

References (7)

1. J. Guo et al.,"Buckled Beam Linear Output Capacitive Strain Sensor", Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, 2004.
2. G. T.A Kovacs, "Micromachined Transducers Sourcebook", McGraw-Hill 1998.
3. W.L. Schulz et al., "Long Gage Fiber Optic Bragg Grating Strain Sensors to Monitor Civil Structures", Proceedings of SPIE 4330 56 (2001).
4. P. Chojnowski et al.,"Strain and Temperature Sensor Applications of Fiber Bragg Grating", Proceedings of SPIE Vol.6347, 2006.
5. K.E.Wojciechowski et al., "A MEMS Resonant Strain Sensor Operated in Air", The 7th Annual International Conference in Micro Electro Mechanical Systems (IEEEMEMS), 2005, pp. 841-845.
6. T.B. Gabrielson, "Mechanical-Thermal Noise in Micromachined Acoustic and Vibration Sensors", IEEE Transactions on Electron Devices, Vol. 40, No. 5, 1993.
7. J.M. Lippmann, "Design and Fabrication of MEMS Resonant Strain Sensor in SOI", Masters of Science Thesis, University of California, Berkeley, 2004.